MEDSI2016 - Classification: Precision Mechanics / Nano-positioning

Paper	Title	Page
MOPE20	Ultra Stiffness And Ultra Low Wawing LM Guide	48
	M. Miret THK GmbH Sucursal en España, Badalona, Spain
	The abstract porpoise is explain how is providing the LM Guide for high performance machine by realizing the waving of Nano-level and achieves super-low waving and ultra-high rigidity by adopting 8 rows of raceways in the LM Guide. These models adopt (1) 8 rows of raceways, (2) small-diameter balls and (3) super-long blocks, in order to realize super-low waving and ultra-high rigidity that surpass the conventional LM Guide. With this approach, the number of effective balls is substantially increased, and the amplitude of the rolling element in motion is minimized. The new models realize super-low waving comparable to hydrostatic guides. In addition, the deformation of the ball is minimized to achieve ultra-high rigidity that surpasses even roller guides. Primary applications Super-precision processing machines/High-precision machining centre/Lathe/Surface grinder/Semiconductor manufacturing equipment/FPD manufacturing machines/High-performance measuring machines. [Waving evaluation] The waving values are approximately 1/10 of that (100 to 300 nm) of conventional ordinary LM Guides.
	Poster MOPE20 [1.600 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE20
About •	paper received ※ 07 September 2016 paper accepted ※ 23 September 2016 issue date ※ 22 June 2017
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MOPE21	The Tripod Unit 6 Axes High Precision Sample Adjustment in UHV
	F. Eggenstein, P. Bischoff, A. Erko, F. Schäfers, F. Senf, A. Sokolov, T. Zeschke HZB, Berlin, Germany
	At BESSY-II we have recently set up a new UV- and XUV optics beamline ,* with an in-house developed versatile reflectometer *** for at-wavelength metrology on reflective and diffractive live sized optical elements up to 4 kg load. High precision measurements of the reflection and polarization properties are feasible by a 360° azimuthal rotation of the sample around the beam of light, where samples can be adjusted reproducibly with a novel UHV-Tripod within arcsec and µm precision. By the tripod the sample is adjustable in 6 degree of freedom: Translations Tx,Ty an Tz and rotations Rx,Ry and Rz while the goniometers rotate the tripod. The two years of operation of the tripod system helped to develop a new tripod geometry for better performance. A new tripod design is presented and compared to the existing system. * F.Schäfers et al., J. Synchrotron Rad. 23, 67 (2015) A.A. Sokolov et al., Review of Scientific Instruments 87,052005(2016) * F. Eggenstein et al., Proc. of SPIE 920607-1(2014)
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MOPE22	Mechanical Design of the MID Split-and-Delay Line at the European XFEL	50
	B. Friedrich, S. Eisebitt, T. Noll MBI, Berlin, Germany S. Eisebitt, B. Friedrich Technische Universität Berlin, Berlin, Germany W. Lu, T. Roth European XFEL, Schenefeld, Germany A. Madsen XFEL. EU, Hamburg, Germany
	A new split-and-delay line (SDL) is under development for the Materials Imaging and Dynamics (MID) end station at the European XFEL.* The device utilises Bragg reflection to provide pairs of X-ray pulses with an energy of (5 - 10) keV and a continuously tunable time delay of (-10 - 800) ps - thus allowing zero-crossing of the time delay. The mechanical concept features separate positioning stages for each optical element. Those are based on a serial combination of coarse motion axes and a fine alignment 6 DoF Cartesian parallel kinematics*. That allows to meet the contradictory demands of a fast long-range travel of up to 1000 mm and in the same time a precise alignment with a resolution in the nanometer range. Multiple laser interferometers monitor the position of the optical elements and allow an active control of their alignment. All optical elements and mechanics will be installed inside an UHV chamber, including the interferometer and about 100 stepper motors. With this paper we present the mechanical design for the SDL. It will additionally show the design of a prototype of a positioning stage which allows extensive testing of the implemented concepts and techniques. A. Madsen et al., Technical Design Report: Scientific Instrument MID, 2013. ** T. Noll et al., Parallel kinematics for nanoscale Cartesian motions, Precision Engineering, vol. 33, no. 3, 2009.
	Poster MOPE22 [4.691 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE22
About •	paper received ※ 11 September 2016 paper accepted ※ 14 September 2016 issue date ※ 22 June 2017
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MOPE23	An Assembling Calibration Method of XBPM Diamond Blades in TPS	54
	H.C. Ho, M.L. Chen, K.H. Hsu, D.-G. Huang, C.K. Kuan, W.Y. Lai, C.J. Lin, S.Y. Perng, T.C. Tseng, H.S. Wang NSRRC, Hsinchu, Taiwan
	Diamond blade type X-ray Beam Position Monitors (XBPM) were adopted to monitor photon position at the beamline front-end in Taiwan Photon Source (TPS). Due to the thin thickness (125um) and fragile characteristic, the assembling precision of the diamond blades are hard to measure and influence the accuracy of monitor. A non-contact method was thus developed by using a led laser with telecentric objective lens and a CCD-array to calibrate the diamond blades assembling configuration within micrometer accuracy. According to the measurement results, XBPM can be correlated to four fiducial points for survey network. This paper describes this method and calibrating results in detail.
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE23
About •	paper received ※ 10 September 2016 paper accepted ※ 19 September 2016 issue date ※ 22 June 2017
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MOPE24	The Precision Adjustment Holder for Montel Mirrors	57
	B.Y. Chen, S.H. Chang, H.Y. Chen, C.Y. Lee, B.H. Lin, M.T. Tang, S.C. Tseng, J.X. Wu, G.C. Yin NSRRC, Hsinchu, Taiwan M. Hong National Taiwan University, Taipei, Taiwan J.R. Kwo NTHU, Hsinchu, Taiwan
	The focusing of X-ray nanoprobe at TPS relay upon the special designed Montel mirrors and its adjustment holder. The holder includes two major parts: (1) fundamental-position alignment part and (2) relative-position adjustment part. The fundamental-position alignment part has the ability to adjust the two mirrors together in 6 DOF., such as X, Y, Z, pitch, roll, and yaw. These translation stages have several-tens mm travel range and nm resolution, while the rotational stages have 40 mrad azimuthal angular range and 0.1~0.01 µrad resolution. The relative-position adjustment part can further adjust the two mirrors to minimize the focal spot. During the pre-alignment process, one of the mirrors can be manual adjusted by micrometer heads in three translation directions with several mm travel range and micro-meters resolution. These micrometer heads also provide this mirror three rotational degree of freedoms with sub-mrad resolution. For the further alignment in vacuum, the additional four piezo-motor actuators can precisely adjust the other Montel mirror in the Y and Z direction with several nm resolution, and its pitch and roll with 1 urad and 0.05 urad resolution, respectively.
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE24
About •	paper received ※ 14 September 2016 paper accepted ※ 19 September 2016 issue date ※ 22 June 2017
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MOPE25	Concept of an in vacuum high resolution Monochromator for IXS experiments
	F.U. Dill DESY, Hamburg, Germany
	Starting April 2017, beamline P01 at Petra III (DESY) will deliver x-rays from the hard x-ray regime all the way down to energies of 2.5 keV. Due to high absorption of 2.5 keV photons in air (more than 99,9 % at 100 mm) our high precision goniometers (three independent stages) for the high resolution monochromator will have to be put into high vacuum (1x10-7 mbar). To our knowledge there is no vacuum compatible high precision goniometer at the market for this range of vacuum. Our approach to solving this problem is to use piezo actuators (a long travel range of the chosen actuator) combined with a high precision spindle ball bearing to make a simple setup of an in vacuum high precision goniometer. The goal is to achieve an angular resolution of 10 nanorad - a movement that will be monitored and controlled by an in vacuum encoder. The piezo driven angular range is set to be ±20 ° and all three goniometers will move independently, along and perpendicular to the beam. Two Pin Diodes, movable in two directions, are going to allow us to monitor the flux before and after the beam hits the crystals.
	Poster MOPE25 [1.156 MB]
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TUAA01	Precision Mechanical Design of a Miniature Dynamic Mirror Bender for the SSRF Beamline Upgrade Project	108
	D. Shu, J.W.J. Anton, S.P. Kearney ANL, Argonne, Illinois, USA J.W.J. Anton University of Illinois at Chicago, Chicago, USA A. Li, C. Mao, Y. Pan SINAP, Shanghai, People’s Republic of China
	Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357 and Argonne SPP project 85·10⁷⁷. Work at SINAP supported by NNSF of China No. U1332120. Dynamic mirror benders which enable high precision figuring of planar substrates for x-ray focusing are widely used as conventional optical equipment in various synchrotron radiation beamlines. Especially, in cases for x-ray focusing optics coated with multilayers in a Kirkpatrick-Baez configuration as the final focusing elements immediately upstream of the sample, the dynamic mirror benders provide high precision figuring to allow the mirror figure to be tuned to optimize the focusing at different incidence angles to cover a wide energy range . Recently, collaboration between Argonne National Laboratory and Shanghai Institute of Applied Physics (SINAP) has produced designs of a new miniature dynamic mirror bender with Argonne’s laminar nanopositioning flexure technique * for beamline upgrade project at the Shanghai Synchrotron Radiation Facility (SSRF). The mechanical design and finite element analyses of the miniature dynamic mirror bender, as well as its initial mechanical test results with laser interferometer are described in this paper. * R. Barrett, J. Härtwig, C. Morawe et al, Synchrotron Radiation News, 23, No.1, 36-42(2010) ** U.S. Patent granted No. 6,984, 335, D. Shu, T. S. Toellner, and E. E. Alp, 2006.
	Slides TUAA01 [7.411 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUAA01
About •	paper received ※ 10 September 2016 paper accepted ※ 23 September 2016 issue date ※ 22 June 2017
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TUAA02	Earth, Wind, and Fire: The New Fast Scanning Velociprobe	112
	C.A. Preissner, J. Deng, C. Jacobsen, B. Lai, F.S. Marin, J. Maser, S.T. Mashrafi, C. Roehrig, S. Sullivan, S. Vogt ANL, Argonne, Illinois, USA
	Funding: Argonne is managed by UChicago Argonne, LLC, for the U.S. Department of Energy under contract DE-AC02-06CH11357. The Advanced Photon Source Upgrade (APS-U) project will include a suite of new beam-lines. In preparation for this, a team at the APS is developing an X-ray microscope with a novel granite (Earth), air bearing (Wind) supported stage to take advantage of the two orders of magnitude increased coherent flux (Fire) that will be available with the APS-U. The instrument will be able to operate as a scanning probe for fluorescence microscopy and as a ptychoprobe for the ultimate in spatial resolution. Both are combined with tomography. The goals for the instrument while operating at the current APS are to demonstrate fast scanning of large samples at high resolution and ptychography at the highest resolution (speed and resolution limited by available flux). This presentation will discuss the unique mechanics, interferometry scheme, the advanced scanning control, and instrument integration.
	Slides TUAA02 [25.518 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUAA02
About •	paper received ※ 10 September 2016 paper accepted ※ 20 September 2016 issue date ※ 22 June 2017
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TUBA01	The Design of a Precision Mechanical Assembly for a Hard X-ray Polarizer	116
	S.P. Kearney, D. Shu, T.S. Toellner ANL, Argonne, Illinois, USA
	Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357 Hard x-ray polarisers are commonly applied in synchrotron radiation research to produce photons in a pure polarization state, and as polarization filters to analyse the photon’s polarization state after their interaction with a sample medium. We present the design of a mechanical assembly suitable for a hard X-ray polariser that requires multiple degrees of freedom with the base stage capable of handling at least 2-3 kg loads. The intermediary stages (roll, yaw, and translation directions) consist of commercially available tip/tilt and translational stages (Kohzu Precision Co., LTD). However, the requirements of the pitch stage are much more demanding and require a custom-designed flexure-based rotation stage. The design and analysis of this flexure-based rotation stage will be discussed in this study. This will include FEA analysis of the dynamic response and rotation range capabilities which will then be compared to mechanical performance test results using laser interferometers and accelerometer sensors.
	Slides TUBA01 [1.586 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUBA01
About •	paper received ※ 09 September 2016 paper accepted ※ 20 September 2016 issue date ※ 22 June 2017
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TUBA02	The New ID11 Nanoscope End-Station - A Nano-Tomography Scanner
	L. Ducotté, J.M. Clement, H. Gleyzolle, J. Wright ESRF, Grenoble, France
	The Nanoscope end-station is currently commissioned at beamline ID11. This end-station is designed for nano-focusing applications and dedicated to diffraction and microscopy experiments using nano diffraction tomography techniques, with a 100 nm size X-ray beam. The distinctive characteristic of this end-station is the integration of commercial nano-positioning stages on top of a high precision air-bearing rotary stage for continuous rotation scans with infinite rotation. For this purpose, a customised electrical slip-ring has been integrated in such a way as to maintain the intrinsic guiding performances of the main rotation stage, i.e. axial and radial errors < 20nm. This slip-ring is designed to carry signals from capacitive probes, encoders, piezo actuators, and is coupled to a rotary joint for vacuum. Another key component is a high precision linear stage for scanning the sample across the beam by moving the rotation axis with a resolution and repeatability < 10nm at the sample position and over a stroke of 10 mm. It has been designed, assembled and characterised at ESRF. The critical design aspects of this end-station and the metrology characterisations will be presented.
	Slides TUBA02 [2.825 MB]
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TUBA03	The Generic Mirror Chamber for the European XFEL	121
	T. Noll BESSY GmbH, Berlin, Germany H. Sinn, A. Trapp XFEL. EU, Hamburg, Germany
	For the high demanding requirements of the beam-lines of the European XFEL [] new mirror chambers were developed, designed and tested. A prototype contains the main features of all needed ten units which are tested extensively. The concept of the mirror chamber is a further development of our Cartesian parallel kinematics for X-ray optics in the UHV []. The stiffness and vibration behaviour were further improved and the position resolution was increased compared to earlier implementations at Bessy and Flash. For that the drives were redesigned and now feature a stroke of 100 mm with nanometer resolution. H. Sinn, TDR: X-Ray Optics and Beam Transport, December 2012, XFEL. EU TR-2012-006 doi:10.3204 ** T. Noll, Parallel kinematics for nanoscale Car-tesian motions, Precision Engineering Vol.33/3 Pg.291
	Slides TUBA03 [38.484 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUBA03
About •	paper received ※ 09 September 2016 paper accepted ※ 15 September 2016 issue date ※ 22 June 2017
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TUBA04	Mechanical Design and Development of Compact Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range and Nanometer-Level Resolution	124
	D. Shu, J.W.J. Anton, S.P. Kearney, B. Lai, W. Liu, J. Maser, C. Roehrig, J.Z. Tischler ANL, Argonne, Illinois, USA J.W.J. Anton University of Illinois at Chicago, Chicago, USA
	Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357. Nanopositioning techniques present an important capability to support the state-of-the-art synchrotron radiation instrumentation research for the APS operations and upgrade project. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, two compact linear nanopositiioning flexure stages have been designed and developed at the APS with centimeter-level travel range and nanometer-level resolution for x-ray experimental applications. The APS T8-54 linear flexure stage is designed to perform a precision wire scan as a differential aperture for the 3-D diffraction microscope at the APS sector 34, and the APS T8-56 linear flexure stage is designed for a horizontal sample scanning stage for a hard x-ray microscope at the APS sector 2. Both linear flexure stages are using a similar improved deformation compensated linear guiding mechanism which was developed initially at the APS for the T8-52 flexural linear stage . The mechanical design and finite element analyses of the APS T8-54 and T8-56 flexural stages, as well as its initial mechanical test results with laser interferometer are described in this paper. U.S. Patent granted No. 8,957, 567, D. Shu, S. Kearney, and C. Preissner, 2015.
	Slides TUBA04 [7.057 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUBA04
About •	paper received ※ 10 September 2016 paper accepted ※ 20 September 2016 issue date ※ 22 June 2017
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Paper

Title

Page

Ultra Stiffness And Ultra Low Wawing LM Guide

48

M. Miret
THK GmbH Sucursal en España, Badalona, Spain

The abstract porpoise is explain how is providing the LM Guide for high performance machine by realizing the waving of Nano-level and achieves super-low waving and ultra-high rigidity by adopting 8 rows of raceways in the LM Guide. These models adopt (1) 8 rows of raceways, (2) small-diameter balls and (3) super-long blocks, in order to realize super-low waving and ultra-high rigidity that surpass the conventional LM Guide. With this approach, the number of effective balls is substantially increased, and the amplitude of the rolling element in motion is minimized. The new models realize super-low waving comparable to hydrostatic guides. In addition, the deformation of the ball is minimized to achieve ultra-high rigidity that surpasses even roller guides. Primary applications Super-precision processing machines/High-precision machining centre/Lathe/Surface grinder/Semiconductor manufacturing equipment/FPD manufacturing machines/High-performance measuring machines. [Waving evaluation] The waving values are approximately 1/10 of that (100 to 300 nm) of conventional ordinary LM Guides.

Poster MOPE20 [1.600 MB]

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE20

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paper received ※ 07 September 2016 paper accepted ※ 23 September 2016 issue date ※ 22 June 2017

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MOPE21

The Tripod Unit 6 Axes High Precision Sample Adjustment in UHV

F. Eggenstein, P. Bischoff, A. Erko, F. Schäfers, F. Senf, A. Sokolov, T. Zeschke
HZB, Berlin, Germany

At BESSY-II we have recently set up a new UV- and XUV optics beamline *,** with an in-house developed versatile reflectometer *** for at-wavelength metrology on reflective and diffractive live sized optical elements up to 4 kg load. High precision measurements of the reflection and polarization properties are feasible by a 360° azimuthal rotation of the sample around the beam of light, where samples can be adjusted reproducibly with a novel UHV-Tripod within arcsec and µm precision. By the tripod the sample is adjustable in 6 degree of freedom: Translations Tx,Ty an Tz and rotations Rx,Ry and Rz while the goniometers rotate the tripod. The two years of operation of the tripod system helped to develop a new tripod geometry for better performance. A new tripod design is presented and compared to the existing system.
* F.Schäfers et al., J. Synchrotron Rad. 23, 67 (2015)
** A.A. Sokolov et al., Review of Scientific Instruments 87,052005(2016)
*** F. Eggenstein et al., Proc. of SPIE 920607-1(2014)

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MOPE22

Mechanical Design of the MID Split-and-Delay Line at the European XFEL

50

B. Friedrich, S. Eisebitt, T. Noll
MBI, Berlin, Germany
S. Eisebitt, B. Friedrich
Technische Universität Berlin, Berlin, Germany
W. Lu, T. Roth
European XFEL, Schenefeld, Germany
A. Madsen
XFEL. EU, Hamburg, Germany

A new split-and-delay line (SDL) is under development for the Materials Imaging and Dynamics (MID) end station at the European XFEL.* The device utilises Bragg reflection to provide pairs of X-ray pulses with an energy of (5 - 10) keV and a continuously tunable time delay of (-10 - 800) ps - thus allowing zero-crossing of the time delay. The mechanical concept features separate positioning stages for each optical element. Those are based on a serial combination of coarse motion axes and a fine alignment 6 DoF Cartesian parallel kinematics**. That allows to meet the contradictory demands of a fast long-range travel of up to 1000 mm and in the same time a precise alignment with a resolution in the nanometer range. Multiple laser interferometers monitor the position of the optical elements and allow an active control of their alignment. All optical elements and mechanics will be installed inside an UHV chamber, including the interferometer and about 100 stepper motors. With this paper we present the mechanical design for the SDL. It will additionally show the design of a prototype of a positioning stage which allows extensive testing of the implemented concepts and techniques.
* A. Madsen et al., Technical Design Report: Scientific Instrument MID, 2013.
** T. Noll et al., Parallel kinematics for nanoscale Cartesian motions, Precision Engineering, vol. 33, no. 3, 2009.

Poster MOPE22 [4.691 MB]

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reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE22

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paper received ※ 11 September 2016 paper accepted ※ 14 September 2016 issue date ※ 22 June 2017

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MOPE23

An Assembling Calibration Method of XBPM Diamond Blades in TPS

54

H.C. Ho, M.L. Chen, K.H. Hsu, D.-G. Huang, C.K. Kuan, W.Y. Lai, C.J. Lin, S.Y. Perng, T.C. Tseng, H.S. Wang
NSRRC, Hsinchu, Taiwan

Diamond blade type X-ray Beam Position Monitors (XBPM) were adopted to monitor photon position at the beamline front-end in Taiwan Photon Source (TPS). Due to the thin thickness (125um) and fragile characteristic, the assembling precision of the diamond blades are hard to measure and influence the accuracy of monitor. A non-contact method was thus developed by using a led laser with telecentric objective lens and a CCD-array to calibrate the diamond blades assembling configuration within micrometer accuracy. According to the measurement results, XBPM can be correlated to four fiducial points for survey network. This paper describes this method and calibrating results in detail.

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE23

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paper received ※ 10 September 2016 paper accepted ※ 19 September 2016 issue date ※ 22 June 2017

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MOPE24

The Precision Adjustment Holder for Montel Mirrors

57

B.Y. Chen, S.H. Chang, H.Y. Chen, C.Y. Lee, B.H. Lin, M.T. Tang, S.C. Tseng, J.X. Wu, G.C. Yin
NSRRC, Hsinchu, Taiwan
M. Hong
National Taiwan University, Taipei, Taiwan
J.R. Kwo
NTHU, Hsinchu, Taiwan

The focusing of X-ray nanoprobe at TPS relay upon the special designed Montel mirrors and its adjustment holder. The holder includes two major parts: (1) fundamental-position alignment part and (2) relative-position adjustment part. The fundamental-position alignment part has the ability to adjust the two mirrors together in 6 DOF., such as X, Y, Z, pitch, roll, and yaw. These translation stages have several-tens mm travel range and nm resolution, while the rotational stages have 40 mrad azimuthal angular range and 0.1~0.01 µrad resolution. The relative-position adjustment part can further adjust the two mirrors to minimize the focal spot. During the pre-alignment process, one of the mirrors can be manual adjusted by micrometer heads in three translation directions with several mm travel range and micro-meters resolution. These micrometer heads also provide this mirror three rotational degree of freedoms with sub-mrad resolution. For the further alignment in vacuum, the additional four piezo-motor actuators can precisely adjust the other Montel mirror in the Y and Z direction with several nm resolution, and its pitch and roll with 1 urad and 0.05 urad resolution, respectively.

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE24

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paper received ※ 14 September 2016 paper accepted ※ 19 September 2016 issue date ※ 22 June 2017

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MOPE25

Concept of an in vacuum high resolution Monochromator for IXS experiments

F.U. Dill
DESY, Hamburg, Germany

Starting April 2017, beamline P01 at Petra III (DESY) will deliver x-rays from the hard x-ray regime all the way down to energies of 2.5 keV. Due to high absorption of 2.5 keV photons in air (more than 99,9 % at 100 mm) our high precision goniometers (three independent stages) for the high resolution monochromator will have to be put into high vacuum (1x10-7 mbar). To our knowledge there is no vacuum compatible high precision goniometer at the market for this range of vacuum. Our approach to solving this problem is to use piezo actuators (a long travel range of the chosen actuator) combined with a high precision spindle ball bearing to make a simple setup of an in vacuum high precision goniometer. The goal is to achieve an angular resolution of 10 nanorad - a movement that will be monitored and controlled by an in vacuum encoder. The piezo driven angular range is set to be ±20 ° and all three goniometers will move independently, along and perpendicular to the beam. Two Pin Diodes, movable in two directions, are going to allow us to monitor the flux before and after the beam hits the crystals.

Poster MOPE25 [1.156 MB]

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TUAA01

Precision Mechanical Design of a Miniature Dynamic Mirror Bender for the SSRF Beamline Upgrade Project

108

D. Shu, J.W.J. Anton, S.P. Kearney
ANL, Argonne, Illinois, USA
J.W.J. Anton
University of Illinois at Chicago, Chicago, USA
A. Li, C. Mao, Y. Pan
SINAP, Shanghai, People’s Republic of China

Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357 and Argonne SPP project 85·10⁷⁷. Work at SINAP supported by NNSF of China No. U1332120.
Dynamic mirror benders which enable high precision figuring of planar substrates for x-ray focusing are widely used as conventional optical equipment in various synchrotron radiation beamlines. Especially, in cases for x-ray focusing optics coated with multilayers in a Kirkpatrick-Baez configuration as the final focusing elements immediately upstream of the sample, the dynamic mirror benders provide high precision figuring to allow the mirror figure to be tuned to optimize the focusing at different incidence angles to cover a wide energy range *. Recently, collaboration between Argonne National Laboratory and Shanghai Institute of Applied Physics (SINAP) has produced designs of a new miniature dynamic mirror bender with Argonne’s laminar nanopositioning flexure technique ** for beamline upgrade project at the Shanghai Synchrotron Radiation Facility (SSRF). The mechanical design and finite element analyses of the miniature dynamic mirror bender, as well as its initial mechanical test results with laser interferometer are described in this paper.
* R. Barrett, J. Härtwig, C. Morawe et al, Synchrotron Radiation News, 23, No.1, 36-42(2010)
** U.S. Patent granted No. 6,984, 335, D. Shu, T. S. Toellner, and E. E. Alp, 2006.

Slides TUAA01 [7.411 MB]

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reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUAA01

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paper received ※ 10 September 2016 paper accepted ※ 23 September 2016 issue date ※ 22 June 2017

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TUAA02

Earth, Wind, and Fire: The New Fast Scanning Velociprobe

112

C.A. Preissner, J. Deng, C. Jacobsen, B. Lai, F.S. Marin, J. Maser, S.T. Mashrafi, C. Roehrig, S. Sullivan, S. Vogt
ANL, Argonne, Illinois, USA

Funding: Argonne is managed by UChicago Argonne, LLC, for the U.S. Department of Energy under contract DE-AC02-06CH11357.
The Advanced Photon Source Upgrade (APS-U) project will include a suite of new beam-lines. In preparation for this, a team at the APS is developing an X-ray microscope with a novel granite (Earth), air bearing (Wind) supported stage to take advantage of the two orders of magnitude increased coherent flux (Fire) that will be available with the APS-U. The instrument will be able to operate as a scanning probe for fluorescence microscopy and as a ptychoprobe for the ultimate in spatial resolution. Both are combined with tomography. The goals for the instrument while operating at the current APS are to demonstrate fast scanning of large samples at high resolution and ptychography at the highest resolution (speed and resolution limited by available flux). This presentation will discuss the unique mechanics, interferometry scheme, the advanced scanning control, and instrument integration.

Slides TUAA02 [25.518 MB]

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reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUAA02

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paper received ※ 10 September 2016 paper accepted ※ 20 September 2016 issue date ※ 22 June 2017

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TUBA01

The Design of a Precision Mechanical Assembly for a Hard X-ray Polarizer

116

S.P. Kearney, D. Shu, T.S. Toellner
ANL, Argonne, Illinois, USA

Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357
Hard x-ray polarisers are commonly applied in synchrotron radiation research to produce photons in a pure polarization state, and as polarization filters to analyse the photon’s polarization state after their interaction with a sample medium. We present the design of a mechanical assembly suitable for a hard X-ray polariser that requires multiple degrees of freedom with the base stage capable of handling at least 2-3 kg loads. The intermediary stages (roll, yaw, and translation directions) consist of commercially available tip/tilt and translational stages (Kohzu Precision Co., LTD). However, the requirements of the pitch stage are much more demanding and require a custom-designed flexure-based rotation stage. The design and analysis of this flexure-based rotation stage will be discussed in this study. This will include FEA analysis of the dynamic response and rotation range capabilities which will then be compared to mechanical performance test results using laser interferometers and accelerometer sensors.

Slides TUBA01 [1.586 MB]

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reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUBA01

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paper received ※ 09 September 2016 paper accepted ※ 20 September 2016 issue date ※ 22 June 2017

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TUBA02

The New ID11 Nanoscope End-Station - A Nano-Tomography Scanner

L. Ducotté, J.M. Clement, H. Gleyzolle, J. Wright
ESRF, Grenoble, France

The Nanoscope end-station is currently commissioned at beamline ID11. This end-station is designed for nano-focusing applications and dedicated to diffraction and microscopy experiments using nano diffraction tomography techniques, with a 100 nm size X-ray beam. The distinctive characteristic of this end-station is the integration of commercial nano-positioning stages on top of a high precision air-bearing rotary stage for continuous rotation scans with infinite rotation. For this purpose, a customised electrical slip-ring has been integrated in such a way as to maintain the intrinsic guiding performances of the main rotation stage, i.e. axial and radial errors < 20nm. This slip-ring is designed to carry signals from capacitive probes, encoders, piezo actuators, and is coupled to a rotary joint for vacuum. Another key component is a high precision linear stage for scanning the sample across the beam by moving the rotation axis with a resolution and repeatability < 10nm at the sample position and over a stroke of 10 mm. It has been designed, assembled and characterised at ESRF. The critical design aspects of this end-station and the metrology characterisations will be presented.

Slides TUBA02 [2.825 MB]

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TUBA03

The Generic Mirror Chamber for the European XFEL

121

T. Noll
BESSY GmbH, Berlin, Germany
H. Sinn, A. Trapp
XFEL. EU, Hamburg, Germany

For the high demanding requirements of the beam-lines of the European XFEL [*] new mirror chambers were developed, designed and tested. A prototype contains the main features of all needed ten units which are tested extensively. The concept of the mirror chamber is a further development of our Cartesian parallel kinematics for X-ray optics in the UHV [**]. The stiffness and vibration behaviour were further improved and the position resolution was increased compared to earlier implementations at Bessy and Flash. For that the drives were redesigned and now feature a stroke of 100 mm with nanometer resolution.
* H. Sinn, TDR: X-Ray Optics and Beam Transport, December 2012, XFEL. EU TR-2012-006 doi:10.3204
** T. Noll, Parallel kinematics for nanoscale Car-tesian motions, Precision Engineering Vol.33/3 Pg.291

Slides TUBA03 [38.484 MB]

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reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUBA03

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paper received ※ 09 September 2016 paper accepted ※ 15 September 2016 issue date ※ 22 June 2017

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TUBA04

Mechanical Design and Development of Compact Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range and Nanometer-Level Resolution

124

D. Shu, J.W.J. Anton, S.P. Kearney, B. Lai, W. Liu, J. Maser, C. Roehrig, J.Z. Tischler
ANL, Argonne, Illinois, USA
J.W.J. Anton
University of Illinois at Chicago, Chicago, USA

Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.
Nanopositioning techniques present an important capability to support the state-of-the-art synchrotron radiation instrumentation research for the APS operations and upgrade project. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, two compact linear nanopositiioning flexure stages have been designed and developed at the APS with centimeter-level travel range and nanometer-level resolution for x-ray experimental applications. The APS T8-54 linear flexure stage is designed to perform a precision wire scan as a differential aperture for the 3-D diffraction microscope at the APS sector 34, and the APS T8-56 linear flexure stage is designed for a horizontal sample scanning stage for a hard x-ray microscope at the APS sector 2. Both linear flexure stages are using a similar improved deformation compensated linear guiding mechanism which was developed initially at the APS for the T8-52 flexural linear stage *. The mechanical design and finite element analyses of the APS T8-54 and T8-56 flexural stages, as well as its initial mechanical test results with laser interferometer are described in this paper.
* U.S. Patent granted No. 8,957, 567, D. Shu, S. Kearney, and C. Preissner, 2015.

Slides TUBA04 [7.057 MB]

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reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUBA04

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paper received ※ 10 September 2016 paper accepted ※ 20 September 2016 issue date ※ 22 June 2017

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