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RIS citation export for MOPE24: The Precision Adjustment Holder for Montel Mirrors

TY  - CONF
AU  - Chen, B.Y.
AU  - Chang, S.H.
AU  - Chen, H.Y.
AU  - Hong, M.
AU  - Kwo, J.R.
AU  - Lee, C.Y.
AU  - Lin, B.H.
AU  - Tang, M.T.
AU  - Tseng, S.C.
AU  - Wu, J.X.
AU  - Yin, G.C.
ED  - Casas, Joan
ED  - Schaa, Volker RW
ED  - Costa, Isidre
ED  - López, David
ED  - Prieto, Montserrat
TI  - The Precision Adjustment Holder for Montel Mirrors
J2  - Proc. of MEDSI2016, Barcelona, Spain, 11-16 September 2016
CY  - Barcelona, Spain
T2  - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conference
T3  - 9
LA  - english
AB  - The focusing of X-ray nanoprobe at TPS relay upon the special designed Montel mirrors and its adjustment holder. The holder includes two major parts: (1) fundamental-position alignment part and (2) relative-position adjustment part. The fundamental-position alignment part has the ability to adjust the two mirrors together in 6 DOF., such as X, Y, Z, pitch, roll, and yaw. These translation stages have several-tens mm travel range and nm resolution, while the rotational stages have 40 mrad azimuthal angular range and 0.1~0.01 µrad resolution. The relative-position adjustment part can further adjust the two mirrors to minimize the focal spot. During the pre-alignment process, one of the mirrors can be manual adjusted by micrometer heads in three translation directions with several mm travel range and micro-meters resolution. These micrometer heads also provide this mirror three rotational degree of freedoms with sub-mrad resolution. For the further alignment in vacuum, the additional four piezo-motor actuators can precisely adjust the other Montel mirror in the Y and Z direction with several nm resolution, and its pitch and roll with 1 urad and 0.05 urad resolution, respectively.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
SP  - 57
EP  - 59
KW  - ion
KW  - focusing
KW  - optics
KW  - alignment
KW  - photon
DA  - 2017/06
PY  - 2017
SN  - 978-3-95450-188-5
DO  - doi:10.18429/JACoW-MEDSI2016-MOPE24
UR  - http://jacow.org/medsi2016/papers/mope24.pdf
ER  -