The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Shu, D. AU - Anton, J.W.J. AU - Kearney, S.P. AU - Lai, B. AU - Liu, W. AU - Maser, J. AU - Roehrig, C. AU - Tischler, J.Z. ED - Casas, Joan ED - Schaa, Volker RW ED - Costa, Isidre ED - López, David ED - Prieto, Montserrat TI - Mechanical Design and Development of Compact Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range and Nanometer-Level Resolution J2 - Proc. of MEDSI2016, Barcelona, Spain, 11-16 September 2016 CY - Barcelona, Spain T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conference T3 - 9 LA - english AB - Nanopositioning techniques present an important capability to support the state-of-the-art synchrotron radiation instrumentation research for the APS operations and upgrade project. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, two compact linear nanopositiioning flexure stages have been designed and developed at the APS with centimeter-level travel range and nanometer-level resolution for x-ray experimental applications. The APS T8-54 linear flexure stage is designed to perform a precision wire scan as a differential aperture for the 3-D diffraction microscope at the APS sector 34, and the APS T8-56 linear flexure stage is designed for a horizontal sample scanning stage for a hard x-ray microscope at the APS sector 2. Both linear flexure stages are using a similar improved deformation compensated linear guiding mechanism which was developed initially at the APS for the T8-52 flexural linear stage *. The mechanical design and finite element analyses of the APS T8-54 and T8-56 flexural stages, as well as its initial mechanical test results with laser interferometer are described in this paper. PB - JACoW Publishing CP - Geneva, Switzerland SP - 124 EP - 127 KW - ion KW - GUI KW - controls KW - laser KW - photon DA - 2017/06 PY - 2017 SN - 978-3-95450-188-5 DO - doi:10.18429/JACoW-MEDSI2016-TUBA04 UR - http://jacow.org/medsi2016/papers/tuba04.pdf ER -