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TY - UNPB AU - Eggenstein, F. AU - Bischoff, P. AU - Erko, A. AU - Schäfers, F. AU - Senf, F. AU - Sokolov, A. AU - Zeschke, T. ED - Casas, Joan ED - Schaa, Volker RW ED - Costa, Isidre ED - López, David ED - Prieto, Montserrat TI - The Tripod Unit 6 Axes High Precision Sample Adjustment in UHV J2 - Proc. of MEDSI2016, Barcelona, Spain, 11-16 September 2016 CY - Barcelona, Spain T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conference T3 - 9 LA - english AB - At BESSY-II we have recently set up a new UV- and XUV optics beamline *,** with an in-house developed versatile reflectometer *** for at-wavelength metrology on reflective and diffractive live sized optical elements up to 4 kg load. High precision measurements of the reflection and polarization properties are feasible by a 360° azimuthal rotation of the sample around the beam of light, where samples can be adjusted reproducibly with a novel UHV-Tripod within arcsec and µm precision. By the tripod the sample is adjustable in 6 degree of freedom: Translations Tx,Ty an Tz and rotations Rx,Ry and Rz while the goniometers rotate the tripod. The two years of operation of the tripod system helped to develop a new tripod geometry for better performance. A new tripod design is presented and compared to the existing system. PB - JACoW Publishing CP - Geneva, Switzerland ER -