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TY - CONF AU - Shu, D. AU - Anton, J.W.J. AU - Kearney, S.P. AU - Li, A. AU - Mao, C. AU - Pan, Y. ED - Casas, Joan ED - Schaa, Volker RW ED - Costa, Isidre ED - López, David ED - Prieto, Montserrat TI - Precision Mechanical Design of a Miniature Dynamic Mirror Bender for the SSRF Beamline Upgrade Project J2 - Proc. of MEDSI2016, Barcelona, Spain, 11-16 September 2016 CY - Barcelona, Spain T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conference T3 - 9 LA - english AB - Dynamic mirror benders which enable high precision figuring of planar substrates for x-ray focusing are widely used as conventional optical equipment in various synchrotron radiation beamlines. Especially, in cases for x-ray focusing optics coated with multilayers in a Kirkpatrick-Baez configuration as the final focusing elements immediately upstream of the sample, the dynamic mirror benders provide high precision figuring to allow the mirror figure to be tuned to optimize the focusing at different incidence angles to cover a wide energy range *. Recently, collaboration between Argonne National Laboratory and Shanghai Institute of Applied Physics (SINAP) has produced designs of a new miniature dynamic mirror bender with Argonne’s laminar nanopositioning flexure technique ** for beamline upgrade project at the Shanghai Synchrotron Radiation Facility (SSRF). The mechanical design and finite element analyses of the miniature dynamic mirror bender, as well as its initial mechanical test results with laser interferometer are described in this paper. PB - JACoW Publishing CP - Geneva, Switzerland SP - 108 EP - 111 KW - ion KW - controls KW - SRF KW - synchrotron-radiation KW - synchrotron DA - 2017/06 PY - 2017 SN - 978-3-95450-188-5 DO - doi:10.18429/JACoW-MEDSI2016-TUAA01 UR - http://jacow.org/medsi2016/papers/tuaa01.pdf ER -