IBIC2015 - List of Authors (Pogorelsky, I.)

Paper	Title	Page
TUPB085	Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography	554
	T.J. Campese, R.B. Agustsson, M.A. Harrison, B.T. Jacobson, A.Y. Murokh, A.G. Ovodenko, M. Ruelas, H.L. To RadiaBeam, Santa Monica, California, USA M.G. Fedurin, I. Pogorelsky, T.V. Shaftan BNL, Upton, Long Island, New York, USA
	Funding: DOE SBIR Grant No DE-SC0007703 RadiaBeam Technologies has developed a compact transverse beam profile measurement system for the Extreme Ultraviolet Lithography (EUL) experiment at the Brookhaven National Laboratory-Accelerator Test Facility (BNL-ATF). The EUL experiment requires fine e-beam and laser alignment across multiple passes. To accomplish this, the system consists of four profile monitor diagnostics: Interaction Point (IP), upstream, downstream, and a sub-micron resolution diagnostic 11.5 mm downstream of the IP. Care was taken in the design to minimize footprint, avoid possible diagnostic collisions, and maximize ease of assembly and alignment. This paper will review the requirements for the dimensional and optical constraints and solutions for this experiment.
	Poster TUPB085 [0.575 MB]
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Paper

Title

Page

Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography

554

T.J. Campese, R.B. Agustsson, M.A. Harrison, B.T. Jacobson, A.Y. Murokh, A.G. Ovodenko, M. Ruelas, H.L. To
RadiaBeam, Santa Monica, California, USA
M.G. Fedurin, I. Pogorelsky, T.V. Shaftan
BNL, Upton, Long Island, New York, USA

Funding: DOE SBIR Grant No DE-SC0007703
RadiaBeam Technologies has developed a compact transverse beam profile measurement system for the Extreme Ultraviolet Lithography (EUL) experiment at the Brookhaven National Laboratory-Accelerator Test Facility (BNL-ATF). The EUL experiment requires fine e-beam and laser alignment across multiple passes. To accomplish this, the system consists of four profile monitor diagnostics: Interaction Point (IP), upstream, downstream, and a sub-micron resolution diagnostic 11.5 mm downstream of the IP. Care was taken in the design to minimize footprint, avoid possible diagnostic collisions, and maximize ease of assembly and alignment. This paper will review the requirements for the dimensional and optical constraints and solutions for this experiment.

Poster TUPB085 [0.575 MB]

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reference for this paper to ※ BibTeX, ※ LaTeX, ※ Text, ※ RIS/RefMan, ※ EndNote (xml)