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LaTeX citation export for TUPB085: Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography

%\cite{Campese:IBIC2015-TUPB085}
\bibitem{Campese:IBIC2015-TUPB085}
   T.J.~Campese, R.B.~Agustsson, M.G.~Fedurin, M.A.~Harrison, B.T.~Jacobson, A.Y.~Murokh, \emph{et al.},
%   T.J. Campese \emph{et al.},
   \textquotedblleft{Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography}\textquotedblright,
%  in \emph{Proc. IBIC2015}, TUPB085, pp. 554--556,
%  in \emph{Proc. IBIC2015}, Melbourne, Australia, September 2015, paper TUPB085, pp. 554--556,
   in \emph{Proc. 4th International Beam Instrumentation Conference (IBIC2015)}, 
   Melbourne, Australia, September 2015, paper TUPB085, pp. 554--556,
   ISBN: 978-3-95450-176-2,
   \url{http://accelconf.web.cern.ch/AccelConf/IBIC2015/papers/tupb085.pdf},
   \url{doi:10.18429/JACoW-IBIC2015-TUPB085}, 2016.