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@InProceedings{Campese:IBIC2015-TUPB085,
author = {Campese, T.J. and Agustsson, R.B. and Fedurin, M.G. and Harrison, M.A. and Jacobson, B.T. and Murokh, A.Y. and Ovodenko, A.G. and Pogorelsky, I. and Ruelas, M. and Shaftan, T.V. and To, H.L.},
title = {{M}ulti{-D}iagnostic {T}ransverse {P}rofile {M}onitor {C}hamber for {E}xtreme {U}ltraviolet {L}ithography},
booktitle = {Proc. of International Beam Instrumentation Conference (IBIC2015),
Melbourne, Australia, 13-17 September 2015},
pages = {554--556},
paper = {TUPB085},
language = {english},
keywords = {diagnostics, laser, electron, target, experiment},
editor = {Mark Boland (SLSA, Clayton, Australia); David Button (ANSTO, Menai, Australia); Kathleen Riches (SLSA, Clayton, Australia); Volker RW Schaa (GSI, Darmstadt, Germany)},
venue = {Melbourne, Australia},
series = {International Beam Instrumentation Conference},
number = {4},
organization = {JACoW},
publisher = {JACoW},
address = {Geneva, Switzerland},
venue = {Melbourne, Australia},
month = {Jan},
year = {2016},
isbn = {978-3-95450-176-2},
doi = {10.18429/JACoW-IBIC2015-TUPB085},
url = {http://accelconf.web.cern.ch/AccelConf/IBIC2015/papers/tupb085.pdf},
note = { },
}