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Text citation export for TUPB085: Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography

   T.J. Campese, R.B. Agustsson, M.G. Fedurin, M.A. Harrison, B.T. Jacobson, A.Y. Murokh, \emph{et al.},
   "Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography",
   in Proc. 4th International Beam Instrumentation Conference, Melbourne, Australia, September 2015, paper TUPB085, pp. 554-556,
   ISBN: 978-3-95450-176-2,
   doi:10.18429/JACoW-IBIC2015-TUPB085,
   http://accelconf.web.cern.ch/AccelConf/IBIC2015/papers/tupb085.pdf, 2016.