MEDSI2018 - List of Authors (Hashimoto, A.H.)

Paper	Title	Page
TUPH25	Morphologies of Oxygen-Free Titanium and Palladium/Titanium Thin Films: New Non-Evaporable Getter (NEG) Coatings	84
	T. Miyazawa Sokendai, The Graduate University for Advanced Studies, Tsukuba, Japan A.H. Hashimoto, M. Yamanaka NIMS, Tsukuba, Ibaraki, Japan T. Kikuchi, K. Mase KEK, Tsukuba, Japan
	Funding: This research was partly supported by a TIA-Kakehashi grant and by the Global Research Center for Environment and Energy based on Nanomaterials Science. Non-evaporable getter (NEG) coatings are ideal for maintaining an ultrahigh vacuum (UHV) in the range 10^'8 Pa and they are widely used for accelerators because they are oil free, magnetic-field free, vibration free, economical, space saving, and energy efficient. We recently fabricated new NEG coatings consisting of low-oxygen-content Ti or oxygen-free Pd/Ti by sublimation under a clean UHV in the range 10^'8 to 10^'7 Pa []. Here, we report the determination of the morphologies of these films by scanning electron microscopy, transmission electron microscopy, scanning transmission electron microscopy, and energy-dispersive X-ray spectroscopy. The Ti and Pd films had almost uniform thicknesses of about 1.3 'm and 50 nm, respectively, and the Pd film completely overcoated the Ti film. Both the Pd and Ti thin films were uniformly deposited in plane on the stainless steel 304L substrate and they had polycrystalline structures. The interface between the Pd and Ti thin films was not abrupt. T. Miyazawa, K. Tobishima, H. Kato, M. Kurihara, S. Ohno, T. Kikuchi, and K. Mase, Vac. Surf. Sci. 61, 227 (2018).
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2018-TUPH25
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Paper

Title

Page

Morphologies of Oxygen-Free Titanium and Palladium/Titanium Thin Films: New Non-Evaporable Getter (NEG) Coatings

84

T. Miyazawa
Sokendai, The Graduate University for Advanced Studies, Tsukuba, Japan
A.H. Hashimoto, M. Yamanaka
NIMS, Tsukuba, Ibaraki, Japan
T. Kikuchi, K. Mase
KEK, Tsukuba, Japan

Funding: This research was partly supported by a TIA-Kakehashi grant and by the Global Research Center for Environment and Energy based on Nanomaterials Science.
Non-evaporable getter (NEG) coatings are ideal for maintaining an ultrahigh vacuum (UHV) in the range 10^'8 Pa and they are widely used for accelerators because they are oil free, magnetic-field free, vibration free, economical, space saving, and energy efficient. We recently fabricated new NEG coatings consisting of low-oxygen-content Ti or oxygen-free Pd/Ti by sublimation under a clean UHV in the range 10^'8 to 10^'7 Pa [*]. Here, we report the determination of the morphologies of these films by scanning electron microscopy, transmission electron microscopy, scanning transmission electron microscopy, and energy-dispersive X-ray spectroscopy. The Ti and Pd films had almost uniform thicknesses of about 1.3 'm and 50 nm, respectively, and the Pd film completely overcoated the Ti film. Both the Pd and Ti thin films were uniformly deposited in plane on the stainless steel 304L substrate and they had polycrystalline structures. The interface between the Pd and Ti thin films was not abrupt.
* T. Miyazawa, K. Tobishima, H. Kato, M. Kurihara, S. Ohno, T. Kikuchi, and K. Mase, Vac. Surf. Sci. 61, 227 (2018).

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2018-TUPH25

Export •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)