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Text/Word citation export for TUPH25: Morphologies of Oxygen-Free Titanium and Palladium/Titanium Thin Films: New Non-Evaporable Getter (NEG) Coatings

T. Miyazawa, A.H. Hashimoto, T. Kikuchi, K. Mase, and M. Yamanaka, “Morphologies of Oxygen-Free Titanium and Palladium/Titanium Thin Films: New Non-Evaporable Getter (NEG) Coatings”, in Proc. MEDSI'18, Paris, France, Jun 2018, pp. 84-87. doi:10.18429/JACoW-MEDSI2018-TUPH25