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@InProceedings{Miyazawa:MEDSI2018-TUPH25, author = {T. Miyazawa and A.H. Hashimoto and T. Kikuchi and K. Mase and M. Yamanaka}, title = {{M}orphologies of {O}xygen{-F}ree {T}itanium and {P}alladium/{T}itanium {T}hin {F}ilms: {N}ew {N}on{-E}vaporable {G}etter ({NEG}) {C}oatings}, booktitle = {Proc. 10th Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (MEDSI'18), Paris, France, 25-29 June 2018}, pages = {84--87}, paper = {TUPH25}, language = {english}, keywords = {vacuum, electron, interface, site, experiment}, venue = {Paris, France}, series = {Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation}, number = {10}, publisher = {JACoW Publishing}, address = {Geneva, Switzerland}, month = {Dec}, year = {2018}, isbn = {978-3-95450-207-3}, doi = {doi:10.18429/JACoW-MEDSI2018-TUPH25}, url = {http://jacow.org/medsi2018/papers/tuph25.pdf}, note = {https://doi.org/10.18429/JACoW-MEDSI2018-TUPH25}, }