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BiBTeX citation export for TUPH25: Morphologies of Oxygen-Free Titanium and Palladium/Titanium Thin Films: New Non-Evaporable Getter (NEG) Coatings

@InProceedings{Miyazawa:MEDSI2018-TUPH25,
  author       = {T. Miyazawa and A.H. Hashimoto and T. Kikuchi and K. Mase and M. Yamanaka},
  title        = {{M}orphologies of {O}xygen{-F}ree {T}itanium and {P}alladium/{T}itanium {T}hin {F}ilms: {N}ew {N}on{-E}vaporable {G}etter ({NEG}) {C}oatings},
  booktitle    = {Proc. 10th Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (MEDSI'18),
                  Paris, France, 25-29 June 2018},
  pages        = {84--87},
  paper        = {TUPH25},
  language     = {english},
  keywords     = {vacuum, electron, interface, site, experiment},
  venue        = {Paris, France},
  series       = {Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
  number       = {10},
  publisher    = {JACoW Publishing},
  address      = {Geneva, Switzerland},
  month        = {Dec},
  year         = {2018},
  isbn         = {978-3-95450-207-3},
  doi          = {doi:10.18429/JACoW-MEDSI2018-TUPH25},
  url          = {http://jacow.org/medsi2018/papers/tuph25.pdf},
  note         = {https://doi.org/10.18429/JACoW-MEDSI2018-TUPH25},
}