The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF
AU - Miyazawa, T.
AU - Hashimoto, A.H.
AU - Kikuchi, T.
AU - Mase, K.
AU - Yamanaka, M.
ED - Schaa, Volker RW
ED - Tavakoli, Keihan
ED - Tilmont, Manuel
TI - Morphologies of Oxygen-Free Titanium and Palladium/Titanium Thin Films: New Non-Evaporable Getter (NEG) Coatings
J2 - Proc. of MEDSI2018, Paris, France, 25-29 June 2018
C1 - Paris, France
T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation
T3 - 10
LA - english
AB - Non-evaporable getter (NEG) coatings are ideal for maintaining an ultrahigh vacuum (UHV) in the range 10^{'}8 Pa and they are widely used for accelerators because they are oil free, magnetic-field free, vibration free, economical, space saving, and energy efficient. We recently fabricated new NEG coatings consisting of low-oxygen-content Ti or oxygen-free Pd/Ti by sublimation under a clean UHV in the range 10^{'}8 to 10^{'}7 Pa [*]. Here, we report the determination of the morphologies of these films by scanning electron microscopy, transmission electron microscopy, scanning transmission electron microscopy, and energy-dispersive X-ray spectroscopy. The Ti and Pd films had almost uniform thicknesses of about 1.3 'm and 50 nm, respectively, and the Pd film completely overcoated the Ti film. Both the Pd and Ti thin films were uniformly deposited in plane on the stainless steel 304L substrate and they had polycrystalline structures. The interface between the Pd and Ti thin films was not abrupt.
PB - JACoW Publishing
CP - Geneva, Switzerland
SP - 84
EP - 87
KW - vacuum
KW - electron
KW - interface
KW - site
KW - experiment
DA - 2018/12
PY - 2018
SN - 978-3-95450-207-3
DO - 10.18429/JACoW-MEDSI2018-TUPH25
UR - http://jacow.org/medsi2018/papers/tuph25.pdf
ER -