Paper | Title | Page |
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THPH16 | Compact Mirror Bender With Sub-Nanometer Adaptive Correction Control | 371 |
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Funding: This work is partially funded by MINECO under contract FIS2015-66328-C3-2-R and by ERDF funds. We present a compact mirror bender with dynamic surface correction. The system is the evolution of an in-house development and will be the default focusing system for the new ALBA beamlines. The bender is now more compact and can introduce stronger curvatures, as required for microfocus applications. It allows for in-situ correction of the mirror surface, with resolution and stability below one nanometer. The bender can compensate parasitic deformations caused by thermal bumps, changes of focus, or stresses appeared during installation or bakeout. The system includes two torque actuators at the ends of the mirror as well as a number of correctors along the mirror length, capable of introducing high order surface corrections. The bending curvature is actively stabilized, by a feedback loop that controls the applied force, to the equivalent of 0.25 nm rms in a 500 mm long mirror. The figure correctors provide up to 20N push-pull force with resolution below .001 N. They combine elastic and magnetic forces to improve their stability. |
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DOI • | reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2018-THPH16 | |
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