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TY - CONF AU - Gonzalez, N. AU - Colldelram, C. AU - González Fernández, J.B. AU - Juanhuix, J. AU - Nicolás, J. AU - Ruget, C. ED - Schaa, Volker RW ED - Tavakoli, Keihan ED - Tilmont, Manuel TI - Compact Mirror Bender With Sub-Nanometer Adaptive Correction Control J2 - Proc. of MEDSI2018, Paris, France, 25-29 June 2018 C1 - Paris, France T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 10 LA - english AB - We present a compact mirror bender with dynamic surface correction. The system is the evolution of an in-house development and will be the default focusing system for the new ALBA beamlines. The bender is now more compact and can introduce stronger curvatures, as required for microfocus applications. It allows for in-situ correction of the mirror surface, with resolution and stability below one nanometer. The bender can compensate parasitic deformations caused by thermal bumps, changes of focus, or stresses appeared during installation or bakeout. The system includes two torque actuators at the ends of the mirror as well as a number of correctors along the mirror length, capable of introducing high order surface corrections. The bending curvature is actively stabilized, by a feedback loop that controls the applied force, to the equivalent of 0.25 nm rms in a 500 mm long mirror. The figure correctors provide up to 20N push-pull force with resolution below .001 N. They combine elastic and magnetic forces to improve their stability. PB - JACoW Publishing CP - Geneva, Switzerland SP - 371 EP - 373 KW - optics KW - controls KW - synchrotron KW - focusing KW - feedback DA - 2018/12 PY - 2018 SN - 978-3-95450-207-3 DO - 10.18429/JACoW-MEDSI2018-THPH16 UR - http://jacow.org/medsi2018/papers/thph16.pdf ER -