Paper | Title | Page |
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TUBA04 | Mechanical Design and Development of Compact Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range and Nanometer-Level Resolution | 124 |
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Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357. Nanopositioning techniques present an important capability to support the state-of-the-art synchrotron radiation instrumentation research for the APS operations and upgrade project. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, two compact linear nanopositiioning flexure stages have been designed and developed at the APS with centimeter-level travel range and nanometer-level resolution for x-ray experimental applications. The APS T8-54 linear flexure stage is designed to perform a precision wire scan as a differential aperture for the 3-D diffraction microscope at the APS sector 34, and the APS T8-56 linear flexure stage is designed for a horizontal sample scanning stage for a hard x-ray microscope at the APS sector 2. Both linear flexure stages are using a similar improved deformation compensated linear guiding mechanism which was developed initially at the APS for the T8-52 flexural linear stage *. The mechanical design and finite element analyses of the APS T8-54 and T8-56 flexural stages, as well as its initial mechanical test results with laser interferometer are described in this paper. * U.S. Patent granted No. 8,957, 567, D. Shu, S. Kearney, and C. Preissner, 2015. |
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Slides TUBA04 [7.057 MB] | |
DOI • | reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUBA04 | |
About • | paper received ※ 10 September 2016 paper accepted ※ 20 September 2016 issue date ※ 22 June 2017 | |
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