MEDSI2016 - Classification: Core Technology Developments / New Manufacturing and Production Techniques

Paper	Title	Page
TUPE22	Low-Order Aberrations Correction of Extreme Ultraviolet Imaging Objective with Deformable Multilayer Mirrors	213
	M. Toyoda, R. Sunayama, M. Yanagihara Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, Sendai, Japan
	For at-wavelength observation of a lithography mask, recently, we proposed an EUV microscope consisting of multilayer-mirror objective (operating wavelength: 13.5 nm, numerical aperture: 0.25). To provide diffraction-limited spatial resolution below 30 nm, reduction of wave aberrations of low order, i.e., spherical aberration, coma, and astigmatism, should be key technical challenge for the microscope. In this paper, firstly, we describe detail of optical design and instrumentation of the point diffraction interferometer (PDI), so as to provide high enough sensing accuracy of 100 pm, which would be required for an optical axis adjustment of the EUV objective. Next, experimental results of wave front correction on the EUV objective are reported. We corrected spherical aberration and coma by precisely aligning an optical axis of the mirrors, while effects of astigmatism were also minimized with a figure-deformable mirror which can control radius of curvature in two mutually orthogonal directions. We confirmed that these low order terms should be less than 0.3 nm RMS.
	Poster TUPE22 [3.217 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUPE22
About •	paper received ※ 06 September 2016 paper accepted ※ 22 September 2016 issue date ※ 22 June 2017
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TUPE23	Glidcop Brazing in Sirius’ High Heat Load Front-End Components	216
	G.V. Claudiano, O.R. Bagnato, P.T. Fonseca, F.R. Francisco, R.L. Parise, L.M. Volpe LNLS, Campinas, Brazil
	Sirius is a 4th generation synchrotron light source in project. Some of Sirius’ beamlines will have a very high power density, more than 50 kW/mrad², to be dissipated in components that have a limited space condition. Thus, the refrigeration of these components is complex when one has in mind that the coolant flow cannot be too turbulent in order to not induce much vibration in the components. Oxygen Free Electrolytic Cu (OFEC) has been replaced by the Glidcop, on 4th generation synchrotron applications, due to its good thermal conductivity and preservation of mechanical properties after heating cycles. However, as this material is not very workable in terms of union with other materials, which led to the development of a brazing process for Glidcop and stainless steel union. Glidcop samples were submitted to a Cu-electroplating process and a silver base alloy (BVAg-8) was used to join the parts in a high vacuum furnace. Electroplating was used to improve the filler metal wettability. The results were very satisfactory, ensuring water and vacuum tightness. A desirable characteristic not yet proved is the virtual leak property. This paper will discourse about this brazing method.
	Poster TUPE23 [1.553 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUPE23
About •	paper received ※ 09 September 2016 paper accepted ※ 22 September 2016 issue date ※ 22 June 2017
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TUPE24	Electro-Formed Copper Cooling Block for AGIPD @ European XFEL
	A. Delfs DESY, Hamburg, Germany
	The European XFEL will generate ultrashort X-ray flashes with a brilliance a billion times higher than that of the best conventional X-ray radiation sources. The AGIPD (Adaptive Gain Integrating Pixel Detector) is a high speed detector for XFEL. It allows single pulse imaging at 4.5 a MHz frame rate with a dynamic range allowing single photon detection and detection of more than 10,000 12.4 keV photons per pixel in the same image. This development is a collaboration between DESY, the University of Hamburg, the University of Bonn (all in Germany) and the Paul Scherrer Institute (PSI) in Switzerland. Four AGIPD modules are mounted on a cooling block using silicone oil as a coolant. The total heat load is about 200 W per cooling block. The aim is to achieve -20°C sensor temperature with a non-uniformity of less than 5 K on the sensors and to cool electronic components with the return flow. The detector components are operated in vacuum. Following first tests with different materials and production methods, the copper cooling blocks were manufactured by electro-forming. The poster gives information on production details and results on cooling tests done on the final detector assembly.
	Poster TUPE24 [0.169 MB]
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TUPE25	Metallurgical Evaluation of Dissimilar Metal Joints for Accelerator Vacuum Chamber Construction at the Advanced Photon Source Upgrade Project	220
	G. Navrotski, B. Brajuskovic ANL, Argonne, Illinois, USA
	Funding: Funding provided by the Advanced Photon Source, U.S. Department of Energy, Office of Science, Argonne National Laboratory under Contract No. DE-AC02-06CH11357. Tubular vacuum chamber assemblies made of aluminum, copper and stainless steel alloys will be used in the new Multi Bend Achromat (MBA) storage ring that is being developed at Advanced Photon Source (APS). Details of the new lattice magnet system design and ring impedance considerations continue to drive these vacuum chambers to smaller dimensions and thinner walls with tighter geometric tolerances under higher thermal loads. It is important to carefully evaluate the methods used to join these dissimilar metal components looking for compromise in primary strength, permeability, electrical and thermal properties while still creating structures that are ultra-high vacuum compatible and leak-tight. This paper visually details the underlying metallurgical changes that occur when joining various combinations of aluminum, OFE copper, GlidCop® and stainless steel using brazing, bonding and welding techniques. Each of the techniques has its advantages and disadvantages with engineering and economic consequences.
	Poster TUPE25 [2.312 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUPE25
About •	paper received ※ 07 September 2016 paper accepted ※ 15 September 2016 issue date ※ 22 June 2017
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

Paper

Title

Page

Low-Order Aberrations Correction of Extreme Ultraviolet Imaging Objective with Deformable Multilayer Mirrors

213

M. Toyoda, R. Sunayama, M. Yanagihara
Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, Sendai, Japan

For at-wavelength observation of a lithography mask, recently, we proposed an EUV microscope consisting of multilayer-mirror objective (operating wavelength: 13.5 nm, numerical aperture: 0.25). To provide diffraction-limited spatial resolution below 30 nm, reduction of wave aberrations of low order, i.e., spherical aberration, coma, and astigmatism, should be key technical challenge for the microscope. In this paper, firstly, we describe detail of optical design and instrumentation of the point diffraction interferometer (PDI), so as to provide high enough sensing accuracy of 100 pm, which would be required for an optical axis adjustment of the EUV objective. Next, experimental results of wave front correction on the EUV objective are reported. We corrected spherical aberration and coma by precisely aligning an optical axis of the mirrors, while effects of astigmatism were also minimized with a figure-deformable mirror which can control radius of curvature in two mutually orthogonal directions. We confirmed that these low order terms should be less than 0.3 nm RMS.

Poster TUPE22 [3.217 MB]

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUPE22

About •

paper received ※ 06 September 2016 paper accepted ※ 22 September 2016 issue date ※ 22 June 2017

Export •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

TUPE23

Glidcop Brazing in Sirius’ High Heat Load Front-End Components

216

G.V. Claudiano, O.R. Bagnato, P.T. Fonseca, F.R. Francisco, R.L. Parise, L.M. Volpe
LNLS, Campinas, Brazil

Sirius is a 4th generation synchrotron light source in project. Some of Sirius’ beamlines will have a very high power density, more than 50 kW/mrad², to be dissipated in components that have a limited space condition. Thus, the refrigeration of these components is complex when one has in mind that the coolant flow cannot be too turbulent in order to not induce much vibration in the components. Oxygen Free Electrolytic Cu (OFEC) has been replaced by the Glidcop, on 4th generation synchrotron applications, due to its good thermal conductivity and preservation of mechanical properties after heating cycles. However, as this material is not very workable in terms of union with other materials, which led to the development of a brazing process for Glidcop and stainless steel union. Glidcop samples were submitted to a Cu-electroplating process and a silver base alloy (BVAg-8) was used to join the parts in a high vacuum furnace. Electroplating was used to improve the filler metal wettability. The results were very satisfactory, ensuring water and vacuum tightness. A desirable characteristic not yet proved is the virtual leak property. This paper will discourse about this brazing method.

Poster TUPE23 [1.553 MB]

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUPE23

About •

paper received ※ 09 September 2016 paper accepted ※ 22 September 2016 issue date ※ 22 June 2017

Export •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

TUPE24

Electro-Formed Copper Cooling Block for AGIPD @ European XFEL

A. Delfs
DESY, Hamburg, Germany

The European XFEL will generate ultrashort X-ray flashes with a brilliance a billion times higher than that of the best conventional X-ray radiation sources. The AGIPD (Adaptive Gain Integrating Pixel Detector) is a high speed detector for XFEL. It allows single pulse imaging at 4.5 a MHz frame rate with a dynamic range allowing single photon detection and detection of more than 10,000 12.4 keV photons per pixel in the same image. This development is a collaboration between DESY, the University of Hamburg, the University of Bonn (all in Germany) and the Paul Scherrer Institute (PSI) in Switzerland. Four AGIPD modules are mounted on a cooling block using silicone oil as a coolant. The total heat load is about 200 W per cooling block. The aim is to achieve -20°C sensor temperature with a non-uniformity of less than 5 K on the sensors and to cool electronic components with the return flow. The detector components are operated in vacuum. Following first tests with different materials and production methods, the copper cooling blocks were manufactured by electro-forming. The poster gives information on production details and results on cooling tests done on the final detector assembly.

Poster TUPE24 [0.169 MB]

Export •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

TUPE25

Metallurgical Evaluation of Dissimilar Metal Joints for Accelerator Vacuum Chamber Construction at the Advanced Photon Source Upgrade Project

220

G. Navrotski, B. Brajuskovic
ANL, Argonne, Illinois, USA

Funding: Funding provided by the Advanced Photon Source, U.S. Department of Energy, Office of Science, Argonne National Laboratory under Contract No. DE-AC02-06CH11357.
Tubular vacuum chamber assemblies made of aluminum, copper and stainless steel alloys will be used in the new Multi Bend Achromat (MBA) storage ring that is being developed at Advanced Photon Source (APS). Details of the new lattice magnet system design and ring impedance considerations continue to drive these vacuum chambers to smaller dimensions and thinner walls with tighter geometric tolerances under higher thermal loads. It is important to carefully evaluate the methods used to join these dissimilar metal components looking for compromise in primary strength, permeability, electrical and thermal properties while still creating structures that are ultra-high vacuum compatible and leak-tight. This paper visually details the underlying metallurgical changes that occur when joining various combinations of aluminum, OFE copper, GlidCop® and stainless steel using brazing, bonding and welding techniques. Each of the techniques has its advantages and disadvantages with engineering and economic consequences.

Poster TUPE25 [2.312 MB]

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUPE25

About •

paper received ※ 07 September 2016 paper accepted ※ 15 September 2016 issue date ※ 22 June 2017

Export •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)