MEDSI2016 - List of Authors (Tseng, S.C.)

Paper	Title	Page
MOPE24	The Precision Adjustment Holder for Montel Mirrors	57
	B.Y. Chen, S.H. Chang, H.Y. Chen, C.Y. Lee, B.H. Lin, M.T. Tang, S.C. Tseng, J.X. Wu, G.C. Yin NSRRC, Hsinchu, Taiwan M. Hong National Taiwan University, Taipei, Taiwan J.R. Kwo NTHU, Hsinchu, Taiwan
	The focusing of X-ray nanoprobe at TPS relay upon the special designed Montel mirrors and its adjustment holder. The holder includes two major parts: (1) fundamental-position alignment part and (2) relative-position adjustment part. The fundamental-position alignment part has the ability to adjust the two mirrors together in 6 DOF., such as X, Y, Z, pitch, roll, and yaw. These translation stages have several-tens mm travel range and nm resolution, while the rotational stages have 40 mrad azimuthal angular range and 0.1~0.01 µrad resolution. The relative-position adjustment part can further adjust the two mirrors to minimize the focal spot. During the pre-alignment process, one of the mirrors can be manual adjusted by micrometer heads in three translation directions with several mm travel range and micro-meters resolution. These micrometer heads also provide this mirror three rotational degree of freedoms with sub-mrad resolution. For the further alignment in vacuum, the additional four piezo-motor actuators can precisely adjust the other Montel mirror in the Y and Z direction with several nm resolution, and its pitch and roll with 1 urad and 0.05 urad resolution, respectively.
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE24
About •	paper received ※ 14 September 2016 paper accepted ※ 19 September 2016 issue date ※ 22 June 2017
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

Paper

Title

Page

The Precision Adjustment Holder for Montel Mirrors

57

B.Y. Chen, S.H. Chang, H.Y. Chen, C.Y. Lee, B.H. Lin, M.T. Tang, S.C. Tseng, J.X. Wu, G.C. Yin
NSRRC, Hsinchu, Taiwan
M. Hong
National Taiwan University, Taipei, Taiwan
J.R. Kwo
NTHU, Hsinchu, Taiwan

The focusing of X-ray nanoprobe at TPS relay upon the special designed Montel mirrors and its adjustment holder. The holder includes two major parts: (1) fundamental-position alignment part and (2) relative-position adjustment part. The fundamental-position alignment part has the ability to adjust the two mirrors together in 6 DOF., such as X, Y, Z, pitch, roll, and yaw. These translation stages have several-tens mm travel range and nm resolution, while the rotational stages have 40 mrad azimuthal angular range and 0.1~0.01 µrad resolution. The relative-position adjustment part can further adjust the two mirrors to minimize the focal spot. During the pre-alignment process, one of the mirrors can be manual adjusted by micrometer heads in three translation directions with several mm travel range and micro-meters resolution. These micrometer heads also provide this mirror three rotational degree of freedoms with sub-mrad resolution. For the further alignment in vacuum, the additional four piezo-motor actuators can precisely adjust the other Montel mirror in the Y and Z direction with several nm resolution, and its pitch and roll with 1 urad and 0.05 urad resolution, respectively.

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE24

About •

paper received ※ 14 September 2016 paper accepted ※ 19 September 2016 issue date ※ 22 June 2017

Export •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)