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MOPE21 |
The Tripod Unit 6 Axes High Precision Sample Adjustment in UHV | |
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At BESSY-II we have recently set up a new UV- and XUV optics beamline *,** with an in-house developed versatile reflectometer *** for at-wavelength metrology on reflective and diffractive live sized optical elements up to 4 kg load. High precision measurements of the reflection and polarization properties are feasible by a 360° azimuthal rotation of the sample around the beam of light, where samples can be adjusted reproducibly with a novel UHV-Tripod within arcsec and µm precision. By the tripod the sample is adjustable in 6 degree of freedom: Translations Tx,Ty an Tz and rotations Rx,Ry and Rz while the goniometers rotate the tripod. The two years of operation of the tripod system helped to develop a new tripod geometry for better performance. A new tripod design is presented and compared to the existing system.
* F.Schäfers et al., J. Synchrotron Rad. 23, 67 (2015) ** A.A. Sokolov et al., Review of Scientific Instruments 87,052005(2016) *** F. Eggenstein et al., Proc. of SPIE 920607-1(2014) |
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