Paper | Title | Page |
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TUAA01 | Precision Mechanical Design of a Miniature Dynamic Mirror Bender for the SSRF Beamline Upgrade Project | 108 |
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Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357 and Argonne SPP project 85·1077. Work at SINAP supported by NNSF of China No. U1332120. Dynamic mirror benders which enable high precision figuring of planar substrates for x-ray focusing are widely used as conventional optical equipment in various synchrotron radiation beamlines. Especially, in cases for x-ray focusing optics coated with multilayers in a Kirkpatrick-Baez configuration as the final focusing elements immediately upstream of the sample, the dynamic mirror benders provide high precision figuring to allow the mirror figure to be tuned to optimize the focusing at different incidence angles to cover a wide energy range *. Recently, collaboration between Argonne National Laboratory and Shanghai Institute of Applied Physics (SINAP) has produced designs of a new miniature dynamic mirror bender with Argonne’s laminar nanopositioning flexure technique ** for beamline upgrade project at the Shanghai Synchrotron Radiation Facility (SSRF). The mechanical design and finite element analyses of the miniature dynamic mirror bender, as well as its initial mechanical test results with laser interferometer are described in this paper. * R. Barrett, J. Härtwig, C. Morawe et al, Synchrotron Radiation News, 23, No.1, 36-42(2010) ** U.S. Patent granted No. 6,984, 335, D. Shu, T. S. Toellner, and E. E. Alp, 2006. |
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Slides TUAA01 [7.411 MB] | |
DOI • | reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2016-TUAA01 | |
About • | paper received ※ 10 September 2016 paper accepted ※ 23 September 2016 issue date ※ 22 June 2017 | |
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