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MOPE24 |
The Precision Adjustment Holder for Montel Mirrors |
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- B.Y. Chen, S.H. Chang, H.Y. Chen, C.Y. Lee, B.H. Lin, M.T. Tang, S.C. Tseng, J.X. Wu, G.C. Yin
NSRRC, Hsinchu, Taiwan
- M. Hong
National Taiwan University, Taipei, Taiwan
- J.R. Kwo
NTHU, Hsinchu, Taiwan
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The focusing of X-ray nanoprobe at TPS relay upon the special designed Montel mirrors and its adjustment holder. The holder includes two major parts: (1) fundamental-position alignment part and (2) relative-position adjustment part. The fundamental-position alignment part has the ability to adjust the two mirrors together in 6 DOF., such as X, Y, Z, pitch, roll, and yaw. These translation stages have several-tens mm travel range and nm resolution, while the rotational stages have 40 mrad azimuthal angular range and 0.1~0.01 µrad resolution. The relative-position adjustment part can further adjust the two mirrors to minimize the focal spot. During the pre-alignment process, one of the mirrors can be manual adjusted by micrometer heads in three translation directions with several mm travel range and micro-meters resolution. These micrometer heads also provide this mirror three rotational degree of freedoms with sub-mrad resolution. For the further alignment in vacuum, the additional four piezo-motor actuators can precisely adjust the other Montel mirror in the Y and Z direction with several nm resolution, and its pitch and roll with 1 urad and 0.05 urad resolution, respectively.
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DOI • |
reference for this paper
※ https://doi.org/10.18429/JACoW-MEDSI2016-MOPE24
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About • |
paper received ※ 14 September 2016 paper accepted ※ 19 September 2016 issue date ※ 22 June 2017 |
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