TUBA02
ESRF, Grenoble, France
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TUBA02 |
The New ID11 Nanoscope End-Station - A Nano-Tomography Scanner | |
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| The Nanoscope end-station is currently commissioned at beamline ID11. This end-station is designed for nano-focusing applications and dedicated to diffraction and microscopy experiments using nano diffraction tomography techniques, with a 100 nm size X-ray beam. The distinctive characteristic of this end-station is the integration of commercial nano-positioning stages on top of a high precision air-bearing rotary stage for continuous rotation scans with infinite rotation. For this purpose, a customised electrical slip-ring has been integrated in such a way as to maintain the intrinsic guiding performances of the main rotation stage, i.e. axial and radial errors < 20nm. This slip-ring is designed to carry signals from capacitive probes, encoders, piezo actuators, and is coupled to a rotary joint for vacuum. Another key component is a high precision linear stage for scanning the sample across the beam by moving the rotation axis with a resolution and repeatability < 10nm at the sample position and over a stroke of 10 mm. It has been designed, assembled and characterised at ESRF. The critical design aspects of this end-station and the metrology characterisations will be presented. | ||
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Slides TUBA02 [2.825 MB] | |
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