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| WEP2PT023 |
Preparation and Characterization of Non-Evaporable Ti-Zr-V Getter Films for HEPS |
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- Y. Ma, D.Z. Guo, P. He, B. Liu, Y.C. Yang
IHEP, Beijing, People's Republic of China
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For the low activation temperature and high pumping speed, surface pumping capacity, the TiZrV coatings were chosen to high energy photo source (HEPS). Films of TiZrV alloy have been deposited on 1.5 meter long, cylindrical vacuum chambers of 22mm diameter copper substrates in krypton ambient using DC magnetron sputtering system. Film composition, the activation temperature and pumping properties have been investigated in order to optimize the deposition parameters for vacuum applications. The films were also studied using the X-ray photo-emission electron spectroscopy (XPS) after annealing them at different temperatures ranging from 120°C to 300°C for two hours in ultra-high vacuum environment. Pumping speed and surface pumping capacity testing facilities were also being constructed to investigate the characterization of TiZrV.
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Poster WEP2PT023 [1.037 MB]
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| DOI • |
reference for this paper
※ https://doi.org/10.18429/JACoW-FLS2018-WEP2PT023
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