Author: Liu, B.
Paper Title Page
WEP2PT023 Preparation and Characterization of Non-Evaporable Ti-Zr-V Getter Films for HEPS 125
 
  • Y. Ma, D.Z. Guo, P. He, B. Liu, Y.C. Yang
    IHEP, Beijing, People's Republic of China
  
  For the low ac­ti­va­tion tem­per­a­ture and high pump­ing speed, sur­face pump­ing ca­pac­ity, the TiZrV coat­ings were cho­sen to high en­ergy photo source (HEPS). Films of TiZrV alloy have been de­posited on 1.5 meter long, cylin­dri­cal vac­uum cham­bers of 22mm di­am­e­ter cop­per sub­strates in kryp­ton am­bi­ent using DC mag­netron sput­ter­ing sys­tem. Film com­po­si­tion, the ac­ti­va­tion tem­per­a­ture and pump­ing prop­er­ties have been in­ves­ti­gated in order to op­ti­mize the de­po­si­tion pa­ra­me­ters for vac­uum ap­pli­ca­tions. The films were also stud­ied using the X-ray photo-emis­sion elec­tron spec­troscopy (XPS) after an­neal­ing them at dif­fer­ent tem­per­a­tures rang­ing from 120°C to 300°C for two hours in ul­tra-high vac­uum en­vi­ron­ment. Pump­ing speed and sur­face pump­ing ca­pac­ity test­ing fa­cil­i­ties were also being con­structed to in­ves­ti­gate the char­ac­ter­i­za­tion of TiZrV.  
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DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-FLS2018-WEP2PT023  
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