The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Ma, Y. AU - Guo, D.Z. AU - He, P. AU - Liu, B. AU - Yang, Y.C. ED - Chin, Yong Ho ED - Zhao, Zhentang ED - Petit-Jean-Genaz, Christine ED - Schaa, Volker RW TI - Preparation and Characterization of Non-Evaporable Ti-Zr-V Getter Films for HEPS J2 - Proc. of FLS2018, Shanghai, China, 5-9 March 2018 C1 - Shanghai, China T2 - ICFA Advanced Beam Dynamics Workshop T3 - 60 LA - english AB - For the low activation temperature and high pumping speed, surface pumping capacity, the TiZrV coatings were chosen to high energy photo source (HEPS). Films of TiZrV alloy have been deposited on 1.5 meter long, cylindrical vacuum chambers of 22mm diameter copper substrates in krypton ambient using DC magnetron sputtering system. Film composition, the activation temperature and pumping properties have been investigated in order to optimize the deposition parameters for vacuum applications. The films were also studied using the X-ray photo-emission electron spectroscopy (XPS) after annealing them at different temperatures ranging from 120°C to 300°C for two hours in ultra-high vacuum environment. Pumping speed and surface pumping capacity testing facilities were also being constructed to investigate the characterization of TiZrV. PB - JACoW Publishing CP - Geneva, Switzerland SP - 125 EP - 127 KW - ion KW - vacuum KW - site KW - experiment KW - radiation DA - 2018/06 PY - 2018 SN - 978-3-95450-206-6 DO - 10.18429/JACoW-FLS2018-WEP2PT023 UR - http://jacow.org/fls2018/papers/wep2pt023.pdf ER -