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RIS citation export for WEP2PT023: Preparation and Characterization of Non-Evaporable Ti-Zr-V Getter Films for HEPS

AU - Ma, Y.
AU - Guo, D.Z.
AU - He, P.
AU - Liu, B.
AU - Yang, Y.C.
ED - Chin, Yong Ho
ED - Zhao, Zhentang
ED - Petit-Jean-Genaz, Christine
ED - Schaa, Volker RW
TI - Preparation and Characterization of Non-Evaporable Ti-Zr-V Getter Films for HEPS
J2 - Proc. of FLS2018, Shanghai, China, 5-9 March 2018
C1 - Shanghai, China
T2 - ICFA Advanced Beam Dynamics Workshop
T3 - 60
LA - english
AB - For the low activation temperature and high pumping speed, surface pumping capacity, the TiZrV coatings were chosen to high energy photo source (HEPS). Films of TiZrV alloy have been deposited on 1.5 meter long, cylindrical vacuum chambers of 22mm diameter copper substrates in krypton ambient using DC magnetron sputtering system. Film composition, the activation temperature and pumping properties have been investigated in order to optimize the deposition parameters for vacuum applications. The films were also studied using the X-ray photo-emission electron spectroscopy (XPS) after annealing them at different temperatures ranging from 120°C to 300°C for two hours in ultra-high vacuum environment. Pumping speed and surface pumping capacity testing facilities were also being constructed to investigate the characterization of TiZrV.
PB - JACoW Publishing
CP - Geneva, Switzerland
SP - 125
EP - 127
KW - ion
KW - vacuum
KW - site
KW - experiment
KW - radiation
DA - 2018/06
PY - 2018
SN - 978-3-95450-206-6
DO - 10.18429/JACoW-FLS2018-WEP2PT023
UR - http://jacow.org/fls2018/papers/wep2pt023.pdf
ER -