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The principle of measurement of the profile or size of small objects
through the spatial coherency of the light is known as the van
Cittert-Zernike theorem. We developed the SR interferometer
(interferometer for synchrotron radiation) to measure the spatial
coherency of the visible region of the SR beam, and we demonstrated that
this method is able to measure the beam profile and size. Since the small
electron beam emits a SR beam which has a good spatial coherency, this
method is suitable for measuring a small beam size. In this paper, the
basic theory for the measurement of the profile or size of a small beam
via the spatial coherency of the light, a design of the SR
interferometer, and the results of beam profile measurement, examples of
small beam size measurements and recent improvements are described.
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