TUP19008 (POSTER)
	Application of Hydrogen Ion Beams for SOI Wafer Formation		435
	H.J. Woo, H.W. Choi, G.D. Kim, J.K. Kim, W. Hong, Y.Y. Ji (KIGAM), W.B. Choi (BNP Science), Y.H. Bae (Uiduk Univ.)