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Text/Word citation export for MOPMB016: Successful Al₂O₃ Coating of Superconducting Niobium Cavities by Thermal ALD

G.K. Deyu, R.H. Blick, I. González Díaz-Palacio, W. Hillert, M. Wenskat, and R. Zierold, “Successful Al₂O₃ Coating of Superconducting Niobium Cavities by Thermal ALD”, in Proc. 21th Int. Conf. RF Supercond. (SRF'23), Grand Rapids, MI, USA, Jun. 2023, pp. 104-108. doi:10.18429/JACoW-SRF2023-MOPMB016