Tan, W.W. Li, B.T. Lu, X.Y. Xiao, L. Xie, D. Yang, D.Y. Yang, Y. Yang, Z.Q. Zhao, J. JACoW Geneva, Switzerland 978-3-95450-191-5 10.18429/JACoW-SRF2017-TUPB055 English 512-515 TUPB055 ion target SRF cavity niobium Contribution to a conference proceedings 2018 2018-01 https://doi.org/10.18429/JACoW-SRF2017-TUPB055 http://jacow.org/srf2017/papers/tupb055.pdf Nb3Sn for SRF cavities has been coated on copper samples by DC magnetron Sputtering. Pure Nb target and pure Sn target were installed separately in the magnetron sputtering device. Nb3Sn precursor was coated on copper in the Ar atmosphere of 0.5 Pa. The Nb3Sn precursor was annealed in the vacuum furnace whose pressure is 10⁻⁴ Pa. The XRD results demonstrate the exist of Nb3Sn crystal, and MPMS results show superconductivity of Nb3Sn. The highest critical temperature obtained is 15K.