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@InProceedings{Sitnikov:RuPAC2018-TUPSA41,
author = {A. Sitnikov and others},
title = {{E}ffect of {T}in {I}on {I}mplantation on the {P}roperties of {A}morphous {G}e2{S}b2{T}e5 {T}hin {F}ilms},
booktitle = {Proc. of Russian Particle Accelerator Conference (RuPAC'18),
Protvino, Russia, 1-5 October 2018},
pages = {230--232},
paper = {TUPSA41},
language = {english},
keywords = {ion, target, electron, ion-source, ECR},
venue = {Protvino, Russia},
series = {Russian Particle Accelerator Conference},
number = {26},
publisher = {JACoW},
address = {Geneva, Switzerland},
month = {Nov.},
year = {2018},
isbn = {978-3-95450-197-7},
doi = {https://doi.org/10.5072/JACoW-RuPAC2018-TUPSA41},
url = {http://jacow.org/rupac2018/papers/tupsa41.pdf},
note = {https://doi.org/10.5072/JACoW-RuPAC2018-TUPSA41},
}