The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Getmanov, Ya.V. AU - Shevchenko, O.A. AU - Vinokurov, N.A. ED - Kuzin, Maxim ED - Schaa, Volker RW TI - Electron Beam Stability in the Energy Recovery Linac for the Lithographic Free Electron Laser J2 - Proc. of RuPAC2016, St. Petersburg, Russia, November 21-25, 2016 C1 - St. Petersburg, Russia T2 - Russian Particle Accelerator Conference T3 - 25 LA - english AB - According to microelectronic production leaders the lithography based on the free electron laser (FEL) could become the main technology for the elements mass production with scale to 5 nm in the nearest future. One of the main problem is the absence of the working FEL with required parameters. The feasibility study of those FEL based on superconducting energy-recovery linac (ERL) was made in Budker INP. The ERL average current is limited by longitudinal and transverse instabilities, caused by interaction between electron beam and its induced fields in the superconducting cavities. The estimations of the threshold currents and ERL parameters were made. PB - JACoW CP - Geneva, Switzerland SP - 319 EP - 321 KW - electron KW - linac KW - cavity KW - undulator KW - radiation DA - 2017/02 PY - 2017 SN - 978-3-95450-181-6 DO - 10.18429/JACoW-RuPAC2016-TUPSA050 UR - http://jacow.org/rupac2016/papers/tupsa050.pdf ER -