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Keyword: implantation
Title
Other Keywords
Page
A High-Current Oxygen Ion Source
extraction, ion, lifetime, plasma
1751
M.R. Shubaly, R.G. Maggs, A.E. Weeden
Implantation of Intense Pulsed Metallic Ion Beam
cathode, electron, ferrite, ion
3341
X.L. Jiang, K.F. Chen, S.C. Jiang, T.M. Wang