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TY - UNPB AU - Wiljes, P. ED - Schaa, Volker RW ED - Tavakoli, Keihan ED - Tilmont, Manuel TI - Challenges for Nanopositioning J2 - Proc. of MEDSI2018, Paris, France, 25-29 June 2018 C1 - Paris, France T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 10 LA - english AB - In nanopositioning systems there are plenty of disturbance sources corrupting the stability of the positioners and optics. Vibrations are induced by machines like pumps and coolers, as well as by car traffic hundreds of meters far from the facility. Furthermore the small and lightweight mechanical components are strongly influenced by sound waves. The positioners themselves may also produce vibrations or at least amplify them by the eigenfrequencies of their flexure joints, which are used for nanometer positioning accuracy without backlash. To identify the sources, amplification and damping of vibrations inside the setup, different kinds of measurements, including broadband frequency stimulation, have been performed on a setup at a nano experimental hutch of a PETRA III Beamline. Therefore some mechanical components and positioning stages were changed against stiffer materials to have comparable measurements to get statements about the quality of the mechanical properties. The poster shows the experimental setup, the measuring methods and some comparing vibration plots, which give information about the identified mechanical behavior. PB - JACoW Publishing CP - Geneva, Switzerland ER -