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TY - CONF AU - Kearney, S.P. AU - Shu, D. ED - Schaa, Volker RW ED - Tavakoli, Keihan ED - Tilmont, Manuel TI - FE Model of a Nanopositioning Flexure Stage for Diagnosis of Trajectory Errors J2 - Proc. of MEDSI2018, Paris, France, 25-29 June 2018 C1 - Paris, France T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 10 LA - english AB - The Advanced Photon Source Upgrade project includes upgrading several beamlines, which desire nanopositioning and fly-scan capabilities. A step towards achieving this is through the use of flexure stages with minimal trajectory errors. Typically, parasitic motion is on the order of micrometer-level displacements and tens of microradian-level rotations [1]. The cause of such errors is difficult to diagnosis due to the scale and complexity of the overall mechanism. Therefore, an FE model of a flexure pivot nanopositioning stage with centimeter-level travel range [1, 2] has been developed to aid in trajectory error diagnosis. Previous work used an FE model and relative error analysis to quantify the effects of assembly error on trajectory errors [3]. Relative error analysis was used due to the difficulty in validating a complex FE model. This study develops an experimentally validated FE model of a single joint to quantify the expected error in the full FE model. The full model is then compared experimentally to the flexure stage to assess the model accuracy and diagnosis trajectory errors. PB - JACoW Publishing CP - Geneva, Switzerland SP - 179 EP - 183 KW - experiment KW - photon KW - simulation KW - interface KW - laser DA - 2018/12 PY - 2018 SN - 978-3-95450-207-3 DO - 10.18429/JACoW-MEDSI2018-WEOAMA05 UR - http://jacow.org/medsi2018/papers/weoama05.pdf ER -