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@InProceedings{Kearney:MEDSI2018-WEOAMA05,
author = {S.P. Kearney and D. Shu},
title = {{FE} {M}odel of a {N}anopositioning {F}lexure {S}tage for {D}iagnosis of {T}rajectory {E}rrors},
booktitle = {Proc. 10th Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (MEDSI'18),
Paris, France, 25-29 June 2018},
pages = {179--183},
paper = {WEOAMA05},
language = {english},
keywords = {experiment, photon, simulation, interface, laser},
venue = {Paris, France},
series = {Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
number = {10},
publisher = {JACoW Publishing},
address = {Geneva, Switzerland},
month = {Dec},
year = {2018},
isbn = {978-3-95450-207-3},
doi = {doi:10.18429/JACoW-MEDSI2018-WEOAMA05},
url = {http://jacow.org/medsi2018/papers/weoama05.pdf},
note = {https://doi.org/10.18429/JACoW-MEDSI2018-WEOAMA05},
}