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RIS citation export for THPH15: A New High Precision, Fully Motorized 6-DoF Sample Stage for the ALBA PEEM Endstation

TY - CONF
AU - Gonzalez, N.
AU - Aballe, L.
AU - Carballedo, A.
AU - Colldelram, C.
AU - Foerster, M.
ED - Schaa, Volker RW
ED - Tavakoli, Keihan
ED - Tilmont, Manuel
TI - A New High Precision, Fully Motorized 6-DoF Sample Stage for the ALBA PEEM Endstation
J2 - Proc. of MEDSI2018, Paris, France, 25-29 June 2018
C1 - Paris, France
T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation
T3 - 10
LA - english
AB - A new 6-DOF sample manipulator has been designed for the ALBA Synchrotron PhotoEmission Electron Microscopy (PEEM) experimental station, based on a commercial Elmitec LEEM 3. The new design includes full motorization of all 6 axes with position feedback, no backlash, and maximized stability, crucial to achieve the best spatial resolution of down to 8 nm (in so-called LEEM mode). The in-plane longitudinal and transversal motions with sub-micron resolution are based on high precision linear guides, while the pitch and roll stages (sample tilt), guided by angular guides, are actuated by a double-flexure system, which enhances the overall rigidity of the system. The vertical stage is composed by a high rigidity recirculating roller screw and cross roller guides. Finally, 360° yaw rotation is supplied by a differentially pumped commercial rotary stage. On top of the stage, the sample support is mounted on a customized DN63CF flange. This support keeps the original functionalities of the sample manipulator and holders, with 6 independent electrical contacts, and the possibility to heat the sample up to 2000 K and cool it to 100 K with an improved liquid nitrogen cooling system.
PB - JACoW Publishing
CP - Geneva, Switzerland
SP - 368
EP - 370
KW - GUI
KW - controls
KW - resonance
KW - vacuum
KW - feedback
DA - 2018/12
PY - 2018
SN - 978-3-95450-207-3
DO - 10.18429/JACoW-MEDSI2018-THPH15
UR - http://jacow.org/medsi2018/papers/thph15.pdf
ER -