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TY - CONF AU - Celestre, R.S. AU - Nowrouzi, K. AU - Padmore, H.A. AU - Shapiro, D.A. ED - Schaa, Volker RW ED - Tavakoli, Keihan ED - Tilmont, Manuel TI - Nanosurveyor 2: A Compact Instrument for Nano-Ptychography at the Advanced Light Source J2 - Proc. of MEDSI2018, Paris, France, 25-29 June 2018 C1 - Paris, France T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 10 LA - english AB - The Advanced Light Source has developed a compact tomographic microscope based on soft x-ray ptychography for the study of meso and nanoscale materials [1,2]. The microscope utilizes the sample manipulator mechanism from a commercial TEM coupled with laser interferometric feedback for zone plate positioning and a fast frame rate charge-coupled device detector for soft x-ray diffraction measurements. The microscope has achieved scan rates of greater than 50 Hz, including motor move, data readout and x-ray exposure, with a positioning accuracy of better than 2 nm RMS and has achieved spatial resolution of better than 5 nm. The instrument enables the use of commercially available sample holders compatible with FEI TEMs. This allows in-situ measurement of samples using both soft x-rays and electrons. This instrument is a refinement of a currently commissioned instrument called The Nanosurveyor, which has demonstrated resolution of better than 20nm in both two and three dimensions using 750 eV x-rays. [3] The instrument has been installed on the new COSMIC beamline at the ALS. It will enable spectromicroscopy and tomography of materials with wavelength limited spatial resolution. PB - JACoW Publishing CP - Geneva, Switzerland SP - 352 EP - 354 KW - survey KW - hardware KW - MMI KW - electron KW - ISOL DA - 2018/12 PY - 2018 SN - 978-3-95450-207-3 DO - 10.18429/JACoW-MEDSI2018-THPH07 UR - http://jacow.org/medsi2018/papers/thph07.pdf ER -