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WECA01 |
Low-Cost, High-Performance Non-Evaporable Getter (NEG) Pumps Using NEG Pills | |
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| Non-evaporable getter (NEG) pumps are widely used for maintaining a clean ultra-high vacuum (UHV) of ≤10-8 Pa because of their high pumping speeds for hydrogen and active gases in the UHV region. In addition, they are oil free, evaporation free, sputtering free, sublimation free, magnetic field free, vibration free, economical, compact, lightweight, and energy saving. In the present paper, we report a new NEG pump which is composed of commercial 60 NEG pills (Dia.10 mm × t3 mm; 70 wt% Zr, 24.6 wt% V, and 5.4 wt% Fe), titanium parts, a DN 40 conflat flange, and a tantalum heater. The NEG pills are vertically and radially aligned around the heater to maximize the effective area for pumping. After activation at 400 °C for 30 min, the pumping speeds of the NEG pump were measured with the orifice method. Pumping speeds of 140-130, 200-140, 190-130, and 35-17 L/s were estimated for H2, CO, CO2, and N2 gasses, respectively, in a pumped-quantity range of 0.01-0.1 Pa·L. Since the NEG pump is composed of a heating unit and a NEG module, the pumping speeds can be improved by increasing the number of NEG modules. These NEG pumps are favourable alternatives to sputtering ion pumps. | ||
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Slides WECA01 [3.077 MB] | |
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WEPE19 |
Present Status of PF BL-13A/B, Vacuum Ultraviolet and Soft X-Ray Undulator Beamlines for Surface Chemistry and STXM | |
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An APPLE-II-type variable polarization undulator was installed at BL-13A/B in Photon Factory (PF) in the end of FY2014, and the user experiments were started in FY2015. Photon flux at BL-13 increased by nearly one order of magnitude compared to the previous one. BL-13A is mainly used for scanning transmission X-ray microscopy (STXM) measurements, while BL-13B is mainly dedicated to surface science using angle-resolved photoelectron spectroscopy (ARPES), high resolution X-ray photoelectron spectroscopy (HR-XPS), and X-ray absorption spectroscopy (XAS) [*]. Present status of PF BL-13A/B will be presented in the poster.
* A. Toyoshima, H. Tanaka, T. Kikuchi, K. Amemiya, and K. Mase, J. Vac. Soc. Jpn., 54 (2011) 580 |
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