WECA01
KEK, Tsukuba, Japan
Yokohama National University, Yokohama, Japan
Chiba University, Chiba, Japan
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WECA01 |
Low-Cost, High-Performance Non-Evaporable Getter (NEG) Pumps Using NEG Pills | |
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| Non-evaporable getter (NEG) pumps are widely used for maintaining a clean ultra-high vacuum (UHV) of ≤10-8 Pa because of their high pumping speeds for hydrogen and active gases in the UHV region. In addition, they are oil free, evaporation free, sputtering free, sublimation free, magnetic field free, vibration free, economical, compact, lightweight, and energy saving. In the present paper, we report a new NEG pump which is composed of commercial 60 NEG pills (Dia.10 mm × t3 mm; 70 wt% Zr, 24.6 wt% V, and 5.4 wt% Fe), titanium parts, a DN 40 conflat flange, and a tantalum heater. The NEG pills are vertically and radially aligned around the heater to maximize the effective area for pumping. After activation at 400 °C for 30 min, the pumping speeds of the NEG pump were measured with the orifice method. Pumping speeds of 140-130, 200-140, 190-130, and 35-17 L/s were estimated for H2, CO, CO2, and N2 gasses, respectively, in a pumped-quantity range of 0.01-0.1 Pa·L. Since the NEG pump is composed of a heating unit and a NEG module, the pumping speeds can be improved by increasing the number of NEG modules. These NEG pumps are favourable alternatives to sputtering ion pumps. | ||
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Slides WECA01 [3.077 MB] | |
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