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TY - UNPB AU - Lubeck, J. AU - Beckhoff, B. AU - Grötzsch, D. AU - Kanngießer, B. AU - Weser, J. ED - Casas, Joan ED - Schaa, Volker RW ED - Costa, Isidre ED - López, David ED - Prieto, Montserrat TI - A New Generation of UHV Instruments for X-Ray Spectrometry at the SR Facilities BESSY II, ELETTRA and SOLEIL and the BLiX Laboratory J2 - Proc. of MEDSI2016, Barcelona, Spain, 11-16 September 2016 CY - Barcelona, Spain T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conference T3 - 9 LA - english AB - A versatile UHV instrument was developed and commissioned by GermanyÂs national metrology institute PTB for SR based X-Ray Reflectometry (XRR) and Spectrometry (XRS) nanoanalytical techniques at BESSY II*. A 9-axis manipulator allows for a sample alignment in all degrees of freedom and provides a rotational and translational movement of photodiodes as well as a translational movement of a beam-geometry defining aperture system. Traceable reference-free, total-reflection and grazing-incidence X-Ray Fluorescence (XRF) analyses were enabled with options for XRR and polarization-dependent X-ray absorption fine structure analyses on up to 100 mm samples aiming at compositional information, species and elemental depth profiles. Three technology transfer projects of adapted instruments enhanced XRS research activities within Europe at the SR facilities ELETTRA (IAEA)** and SOLEIL (CEA/LNE-LNHB) as well as at the X-ray innovation laboratory BLiX (TU Berlin)*** where different sources are used****. The expertise gained here lead to a next generation development enabling a very flexible use at four different SR beamlines for XRS and hard X-ray emission spectroscopy of up to 150 mm samples. PB - JACoW Publishing CP - Geneva, Switzerland ER -