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TY - CONF AU - Umemori, K. AU - Egi, M. AU - Kako, E. AU - Konomi, T. AU - Michizono, S. AU - Sakai, H. ED - Pei, Guoxi ED - Schaa, Volker RW ED - Chin, Yong Ho ED - Fu, Shinian ED - Zhao, Ning TI - Design and Commissioning of KEK New Vacuum Furnace for SRF Cavity Development J2 - Proc. of LINAC2018, Beijing, China, 16-21 September 2018 CY - Beijing, China T2 - Linear Accelerator Conference T3 - 29 LA - english AB - Recently new techniques such as Nitrogen-doping and Nitrogen-infusion have been developed to improve performance of SRF (Superconducting RF) cavities. We purchased a new vacuum furnace, which is key to realize these techniques. Cleanness of the furnace is most important issue. The furnace has a cryo-pump and whole of vacuum system is oil-free system. Target vacuum level after cooling down is 1x10⁻⁶ Pa. Heater, reflectors and support table were made from Molybdenum to avoid contamination during heat treatment. Metal gaskets are used for all vacuum seals, except big doors. Maximum operation temperature is 1150 degree C. Size is around 1 m diameter and 2m long for a 1.3 GHz 9-cell cavity. Entrance of furnace is covered by a clean booth. The furnace was fabricated, assembled at KEK COI building and commissioned this year. After several burning runs, target vacuum pressure was achieved after cooling down to room temperature. Design of the furnace and performance during commissioning runs are presented. PB - JACoW Publishing CP - Geneva, Switzerland SP - 496 EP - 498 KW - cavity KW - vacuum KW - injection KW - MMI KW - operation DA - 2019/01 PY - 2019 SN - 2226-0366 SN - 978-3-95450-194-6 DO - DOI: 10.18429/JACoW-LINAC2018-TUPO070 UR - http://jacow.org/linac2018/papers/tupo070.pdf ER -