The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Shao, J.Q. AU - Chen, C. AU - Ge, X.Q. AU - Li, W. AU - Wang, S. AU - Wang, Y. AU - Wei, W. AU - Zhang, B. AU - Zhang, Y.X. AU - Zhu, B.L. ED - Boland, Mark ED - Tanaka, Hitoshi ED - Button, David ED - Dowd, Rohan ED - Schaa, Volker RW ED - Tan, Eugene TI - Preparation of Titanum-Zirconium-Vanadium Films by Quantitative Deposition J2 - Proc. of IPAC2019, Melbourne, Australia, 19-24 May 2019 CY - Melbourne, Australia T2 - International Particle Accelerator Conference T3 - 10 LA - english AB - TiZrV has been used in vacuum technology and electric vacuum devices due to its high pumping speed and low activation temperature in recent years. At the same time, many preparation methods have been developed. Different from the current coating method of magnetron sputtering, this paper discusses the preparation of thin film coating from the viewpoint of vacuum sintering, which is flexible in design and more suitable for operation. Based on the analysis of the surface morphology of the sintered film, the feasibility and operability of the experimental method were explored from the surface compactness of the getter. PB - JACoW Publishing CP - Geneva, Switzerland SP - 4210 EP - 4212 KW - vacuum KW - experiment KW - electron KW - ECR KW - operation DA - 2019/06 PY - 2019 SN - 978-3-95450-208-0 DO - DOI: 10.18429/JACoW-IPAC2019-THPTS045 UR - http://jacow.org/ipac2019/papers/thpts045.pdf ER -