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The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.


Text/Word citation export for THPMP013: Challenges Towards Industrialization of the ERL-FEL Light Source for EUV Lithography

N. Nakamura et al., “Challenges Towards Industrialization of the ERL-FEL Light Source for EUV Lithography”, in Proc. IPAC'19, Melbourne, Australia, May 2019, pp. 3478-3481. doi:10.18429/JACoW-IPAC2019-THPMP013