The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Nakamura, N. AU - Kako, E. AU - Kato, R. AU - Kawata, H. AU - Miyajima, T. AU - Sakai, H. AU - Umemori, K. ED - Boland, Mark ED - Tanaka, Hitoshi ED - Button, David ED - Dowd, Rohan ED - Schaa, Volker RW ED - Tan, Eugene TI - Challenges Towards Industrialization of the ERL-FEL Light Source for EUV Lithography J2 - Proc. of IPAC2019, Melbourne, Australia, 19-24 May 2019 CY - Melbourne, Australia T2 - International Particle Accelerator Conference T3 - 10 LA - english AB - EUV Lithography is going to HVM (high volume manufacturing) stage with 250-W-class laser-produced plasma sources and it is important to develop a new-type EUV light source to meet future demand for higher power. Energy-recovery linac based free-electron lasers (ERL-FELs) are possible candidates of a high-power EUV light source that can distribute 1 kW power to multiple scanners simultaneously. In Japan, an ERL-FEL based EUV light source has been designed using available technologies without much development to demonstrate generation of EUV power more than 10 kW and the EUV-FEL Light Source Study Group for Industrialization has been established since 2015 to realize industrialization of the light source and the related items. For industrialization, high availability is essential as well as high power and reduction of the light source size is also required. In this paper, we will report an overview of the designed ERL-FEL light source for EUV lithography and some activities for the industrialization and describe considerations and developments for obtaining high availability and size reduction of the light source. PB - JACoW Publishing CP - Geneva, Switzerland SP - 3478 EP - 3481 KW - FEL KW - cavity KW - SRF KW - cathode KW - undulator DA - 2019/06 PY - 2019 SN - 978-3-95450-208-0 DO - DOI: 10.18429/JACoW-IPAC2019-THPMP013 UR - http://jacow.org/ipac2019/papers/thpmp013.pdf ER -