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BiBTeX citation export for THPMP013: Challenges Towards Industrialization of the ERL-FEL Light Source for EUV Lithography

  author       = {N. Nakamura and others},
  title        = {{C}hallenges {T}owards {I}ndustrialization of the {ERL-FEL} {L}ight {S}ource for {EUV} {L}ithography},
  booktitle    = {Proc. 10th International Particle Accelerator Conference (IPAC'19),
                  Melbourne, Australia, 19-24 May 2019},
  pages        = {3478--3481},
  paper        = {THPMP013},
  language     = {english},
  keywords     = {FEL, cavity, SRF, cathode, undulator},
  venue        = {Melbourne, Australia},
  series       = {International Particle Accelerator Conference},
  number       = {10},
  publisher    = {JACoW Publishing},
  address      = {Geneva, Switzerland},
  month        = {Jun.},
  year         = {2019},
  isbn         = {978-3-95450-208-0},
  doi          = {doi:10.18429/JACoW-IPAC2019-THPMP013},
  url          = {http://jacow.org/ipac2019/papers/thpmp013.pdf},
  note         = {https://doi.org/10.18429/JACoW-IPAC2019-THPMP013},