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TY - CONF AU - Schmidt, M. AU - Laux, P. AU - Zschornack, G.H. ED - Koscielniak, Shane ED - Satogata, Todd ED - Schaa, Volker RW ED - Thomson, Jana TI - An EBIS-Based Low-Energy Accelerator for Fine-Focussed Ion Beams J2 - Proc. of IPAC2018, Vancouver, BC, Canada, April 29-May 4, 2018 C1 - Vancouver, BC, Canada T2 - International Particle Accelerator Conference T3 - 9 LA - english AB - Technologies based on focused ion beams have become indispensable for research institutions as well as commercial laboratories and high-tech production facilities (micro- and nanotechnology, semiconductor technology). We report on a compact setup combining an Electron Beam Ion Source (EBIS), a Wien filter for ion species separation, and a fine focusing ion acceleration column capable of producing ion beams with beam diameters in the micrometer range at ion beam energies up to the MeV range. Almost all elements of the periodic system can be injected into the EBIS to produce a broad spectrum of ion charge states with only one ion source. The beam energy of a selected ion species can easily be varied by changing the electric potential of the EBIS drift tube in which the ions are generated, resulting in different implantation depths in various solids. We present studies on beam diameter and emittance, available charge states, and SEM imaging as application. PB - JACoW Publishing CP - Geneva, Switzerland SP - 647 EP - 650 KW - ion-source KW - electron KW - target KW - acceleration KW - emittance DA - 2018/06 PY - 2018 SN - 978-3-95450-184-7 DO - 10.18429/JACoW-IPAC2018-TUYGBF3 UR - http://jacow.org/ipac2018/papers/tuygbf3.pdf ER -