Deposition and Characterization of TiZrHfV films by DC Magnetron Sputtering

Ge, Xiaoqin; He, Tianlong; Pei, Xiangtao; Wang, Yigang; Wang, Yong; Wei, Wei; Zhang, Bo; Zhang, Yuxin

doi:10.18429/JACoW-IPAC2018-THPML129

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BiBTeX citation export for THPML129: Deposition and Characterization of TiZrHfV films by DC Magnetron Sputtering

@InProceedings{Ge:IPAC2018-THPML129,
  author       = {X.Q. Ge and others},
  title        = {{D}eposition and {C}haracterization of {T}i{Z}r{H}f{V} films by {DC} {M}agnetron {S}puttering},
  booktitle    = {Proc. 9th International Particle Accelerator Conference (IPAC'18),
                  Vancouver, BC, Canada, April 29-May 4, 2018},
  pages        = {4983--4985},
  paper        = {THPML129},
  language     = {english},
  keywords     = {vacuum, electron, controls, storage-ring, target},
  venue        = {Vancouver, BC, Canada},
  series       = {International Particle Accelerator Conference},
  number       = {9},
  publisher    = {JACoW Publishing},
  address      = {Geneva, Switzerland},
  month        = {June},
  year         = {2018},
  isbn         = {978-3-95450-184-7},
  doi          = {doi:10.18429/JACoW-IPAC2018-THPML129},
  url          = {http://jacow.org/ipac2018/papers/thpml129.pdf},
  note         = {https://doi.org/10.18429/JACoW-IPAC2018-THPML129},
}