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TY - CONF AU - Ito, R. AU - Hayano, H. AU - Ito, H. AU - Iwashita, Y. AU - Katayama, R. AU - Kubo, T. AU - Nagata, T. AU - Oikawa, H. AU - Saeki, T. ED - Koscielniak, Shane ED - Satogata, Todd ED - Schaa, Volker RW ED - Thomson, Jana TI - Development of Coating Technique for Superconducting Multilayered Structure J2 - Proc. of IPAC2018, Vancouver, BC, Canada, April 29-May 4, 2018 C1 - Vancouver, BC, Canada T2 - International Particle Accelerator Conference T3 - 9 LA - english AB - In order to increase the maximum acceleration gradient of SRF cavities, S-I-S (superconductor-insulator-superconductor) multilayered structure theory has been proposed. We focused on NbN which has a higher superconducting transition temperature than Nb. Firstly, we researched the optimal deposition condition for N2 gas reactive sputtering of NbN by using in-house inter-back type DC magnetron sputtering equipment. The critical condition for a thin film with strong crystalline orientation of NbN was identified. The superconducting transition temperature of the NbN thin film, which were coated under the best condition, was over 14 K. Secondly, we tried making S-I-S multilayered samples that was composed of NbN/SiO2/Nb substrate. The coating condition for the NbN layer was determined based on the research results in a single layer. The SiO2 layer was deposited with a film thickness of 30 nm that was theoretically expected to be effective as barrier layer. We applied O2 gas reactive AC magnetron sputtering for coating. In this article, the detailed results of the NbN single layer and multilayer film depositions are presented. PB - JACoW Publishing CP - Geneva, Switzerland SP - 4954 EP - 4956 KW - site KW - cavity KW - target KW - experiment KW - acceleration DA - 2018/06 PY - 2018 SN - 978-3-95450-184-7 DO - 10.18429/JACoW-IPAC2018-THPML120 UR - http://jacow.org/ipac2018/papers/thpml120.pdf ER -