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TY - CONF AU - Wang, S. AU - Hong, Y.Z. AU - Huang, R. AU - Pei, X.T. AU - Wang, Y. AU - Wei, W. AU - Zhang, B. AU - Zhang, S.C. ED - Koscielniak, Shane ED - Satogata, Todd ED - Schaa, Volker RW ED - Thomson, Jana TI - Development of Non-Evaporable Getter (NEG) Coatings on Small Diameter Vacuum Chambers for Diffraction-Limited Storage Ring J2 - Proc. of IPAC2018, Vancouver, BC, Canada, April 29-May 4, 2018 C1 - Vancouver, BC, Canada T2 - International Particle Accelerator Conference T3 - 9 LA - english AB - Design of the fourth generation Diffraction-Limited Storage Ring reduces aperture of vacuum chambers to a few centimeters. To satisfy the small aperture, the intense photon bombardment and the requirement of low pressure, most of the beam pipes need to be deposited with Ti-Zr-V nonevaporable getter (NEG) thin films. NEG can provide distributed pumping and low gas desorption and allow to achieve low pressure in narrow and conductance limited chambers. In this paper, Ti-Zr-V thin film was deposited by DC magnetron sputtering using Ti-Zr-V alloy target. The morphology and thickness of Ti-Zr-V are characterized by Scanning Electron Microscopy (SEM). The average grain size is evaluated using X-ray diffraction (XRD). The composition and the corresponding chemical bonding of the thin film are analyzed by X-ray Photoelectron Spectroscopy (XPS). Finally, the adhesion between the film and substrate and the vacuum performance are evaluated. PB - JACoW Publishing CP - Geneva, Switzerland SP - 4611 EP - 4613 KW - vacuum KW - site KW - target KW - electron KW - storage-ring DA - 2018/06 PY - 2018 SN - 978-3-95450-184-7 DO - 10.18429/JACoW-IPAC2018-THPMK125 UR - http://jacow.org/ipac2018/papers/thpmk125.pdf ER -