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TY - CONF AU - Sayeed, MNS. AU - Elsayed-Ali, H. AU - Eremeev, G.V. AU - Kelley, M.J. AU - Pudasaini, U. AU - Reece, C.E. ED - Koscielniak, Shane ED - Satogata, Todd ED - Schaa, Volker RW ED - Thomson, Jana TI - Magnetron Sputtering of Nb3Sn for SRF Cavities J2 - Proc. of IPAC2018, Vancouver, BC, Canada, April 29-May 4, 2018 C1 - Vancouver, BC, Canada T2 - International Particle Accelerator Conference T3 - 9 LA - english AB - Nb3Sn is a potential candidate for surface material of SRF cavities since it can enable the cavity to operate at higher temperatures with high quality factor and at an increased accelerating gradient. Nb-Sn films were deposited using magnetron sputtering of individual Nb and Sn targets onto Nb and sapphire substrates. The as-deposited films were annealed at 1200 °C for 3 hours. The films were characterized for their structure by X-ray Diffraction (XRD), morphology by Field Emission Scanning Electron Microscopy (FESEM), and composition by Energy Dispersive X-ray Spectroscopy (EDS) and Time of Flight Secondary Ion Mass Spectrometry (ToF-SIMS). The surface resistivity was measured down to cryogenic temperature to determine the superconducting transition temperature and its width. The composition of the multilayered films was controlled by varying the thickness of the Nb and Sn layers. The films showed crystalline Nb3Sn phases with Tc up to 17.6 K. PB - JACoW Publishing CP - Geneva, Switzerland SP - 3946 EP - 3949 DA - 2018/06 PY - 2018 SN - 978-3-95450-184-7 DO - 10.18429/JACoW-IPAC2018-THPAL129 UR - http://jacow.org/ipac2018/papers/thpal129.pdf ER -