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BiBTeX citation export for MOPML011: Liquid Cluster Ion Beam Processing of Transition Metal Films

@InProceedings{Shimizu:IPAC2018-MOPML011,
  author       = {D. Shimizu and H. Ryuto and M. Takeuchi and D. Yamamoto},
  title        = {{L}iquid {C}luster {I}on {B}eam {P}rocessing of {T}ransition {M}etal {F}ilms},
  booktitle    = {Proc. 9th International Particle Accelerator Conference (IPAC'18),
                  Vancouver, BC, Canada, April 29-May 4, 2018},
  pages        = {415--417},
  paper        = {MOPML011},
  language     = {english},
  keywords     = {vacuum, acceleration, radiation, target, experiment},
  venue        = {Vancouver, BC, Canada},
  series       = {International Particle Accelerator Conference},
  number       = {9},
  publisher    = {JACoW Publishing},
  address      = {Geneva, Switzerland},
  month        = {June},
  year         = {2018},
  isbn         = {978-3-95450-184-7},
  doi          = {doi:10.18429/JACoW-IPAC2018-MOPML011},
  url          = {http://jacow.org/ipac2018/papers/mopml011.pdf},
  note         = {https://doi.org/10.18429/JACoW-IPAC2018-MOPML011},
}